Filmetrics, Inc. Datasheets for Wafer and Thin Film Instrumentation

Instruments such as quartz crystal microbalance (QCM) monitors, ellipsometers, RHEED systems, imaging stations, CD-SEMs, ion mills, C-V systems specifically designed for wafer metrology or in-situ monitoring of thin film parameters during thin film or semiconductors wafer processing.
Wafer and Thin Film Instrumentation: Learn more

Product Name Notes
Automated Cassette-to-Cassette Thin Film Thickness Mapping System -- F60-c Series Automated Cassette-to-Cassette Thin-Film Thickness Mapping System for Production Environments The Filmetrics F60-c family maps film thickness and index just like our F50 products, but it also includes a number of...
Automated Film Thickness Mapping Machine -- F50 Series Automated Film Thickness Mapping The Filmetrics F50 family of products can map film thickness as quickly as two points per second. A motorized R-Theta stage accepts standard and custom chucks...
Automated Film Thickness Mapping Machine -- F60-t Series Automated Thickess Mapping for Production Environments The Filmetrics F60-t family maps film thickness and index just like our F50 products, but it also includes a number of features intended specifically...
Microscopic Spot Measurement Instrument -- F40-NSR Boost the Capabilities and Extend the Life of Your NanoSpec™ 180/210 System Your NanoSpec™ has been a workhorse for your fab, but many years of use may have caused maintenance...
Microscopic Spot Measurement Instrument -- F42 High-Resolution Film Thickness Maps The Filmetrics F42 can map the thickness of films, such as OSP, at over one-million points, each with a spot size as small as 3 microns.
Microscopic Spot Measurement Instrument -- F40-UV Series Measure Films as Thin as 4nm The F40-UV can be configured to measure films as thin as 4nm on a spot size as small as 7 microns. It comes complete...
Product Wafer Metrology Instrument -- F80-c Series
Product Wafer Metrology Instrument -- F80-t Series
Product-Wafer Metrology Made Affordable Process engineers want film thickness measurements fast and without a lot of hassle. Our innovative Thickness Imaging™ technology allows Filmetrics to offer easy recipe set up...
Thin Film Deposition Monitor -- F30 Series The Most Powerful Tool Available for Monitoring Thin-Film Deposition Measure deposition rates, film thickness, optical constants (n and k), and uniformity of semiconductors and dielectric layers in real-time with the...
Microscopic Spot Measurement Instrument -- F40 Series Turn Your Microscope into a Film Thickness Measurement Tool The F40 product family is for applications that require a spot size as small as 1 micron. For most microscopes the...
Thin Film Deposition Monitor -- F37 Series Measure film thickness in-line and in real-time at up to seven locations with the F37. Example Layers Almost any smooth and at-least-partially transparent films may be measured. This includes virtually...