Filmetrics, Inc. Automated Cassette-to-Cassette Thin Film Thickness Mapping System F60-c Series

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Automated Cassette-to-Cassette Thin Film Thickness Mapping System - F60-c Series - Filmetrics, Inc.
San Diego, CA, USA
Automated Cassette-to-Cassette Thin Film Thickness Mapping System F60-c Series
Automated Cassette-to-Cassette Thin-Film Thickness Mapping System for Production Environments The Filmetrics F60-c family maps film thickness and index just like our F50 products, but it also includes a number of features intended specifically for production environments. These include automatic notch finding, automatic on-board baselining, an enclosed measurement stage with motion interlock, an industrial computer with pre-installed software, and cassette-to-cassette robotic wafer handling. The different F60-c instruments are distinguished primarily by thickness and wavelength range. Generally shorter wavelengths (e.g. F60-c-UV) are required to measure thinner films, while longer wavelengths allow measurement of thicker, rougher, and more opaque films. What's Included Integrated Stage/Spectrometer/L ight Source Unit (chuck not included) 4", 6" and 200mm Reference Wafers TS-SiO2-4-7200 Thickness standard Vacuum Pump Spare TH-1 lamp Tweezers
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Technical Specifications

  Filmetrics, Inc.
Product Category Wafer and Thin Film Instrumentation
Product Number F60-c Series
Product Name Automated Cassette-to-Cassette Thin Film Thickness Mapping System
Form Factor Monitor or instrument
Applications Wafer; CVD / PVD
Measurements Area mapping
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