EBARA's GDC250 point-of-use gas abatement system combines the features and benefits of a patented rolling burner and a high efficiency fan scrubber. The GDC250 is specifically designed for high decomposition abilities for both hydride and PFC (perfluorocompound) gases used in semiconductor applications.
Special coatings, advanced corrosion resistant metal alloys and scrapers control corrosion and clogging issues experienced with today's harshest processes. With a small footprint, low utility consumption and multiple fuel burning methods, the GDC250 has the ability to treat 250 slm of inlet flow while removing the combustion solid by-products.
|EBARA Technologies, Inc.|
|Product Name||GDC Abatement System|