Denton Vacuum Datasheets for Thin Film Equipment

Thin film equipment uses vacuum processing for the modification of surfaces using CVD, PVD, plasma etching, and thermal oxidation or ion implantation.
Thin Film Equipment: Learn more

Product Name Notes
Cold Sputtering Platform The Desk V HP series is used extensively for scanning electron microscope (SEM), transmission electron microscope (TEM) sample preparation and Iridium coating applications. The Desk V HP...
Compact, High Performance Sputtering Platform The Desktop Pro provides high performance sputtering in a compact and economical system. Save Space The Desktop Pro requires less than 36" of countertop space.
The addition of the Voyager to Denton Vacuum's range of deposition platforms provides the thin film specialist with the ability to deposit a variety of films previously difficult to produce...
The Bench Top Turbo high vacuum thin film deposition system that achieves an ultimate base vacuum in the 3x10-6 torr range. And the the system fits on your countertop. Get...
The Discovery® HDG Ion Beam Deposition and Etch Platform The Discovery HDG provides a turnkey system for a range of processes: Ion Beam Deposition, Ion Beam Assisted Deposition, Ion Beam...
The Discovery® series represents Denton Vacuum's offerings in pilot-scale sputtering systems. Utilizing a unique orientation of the sample to the sputtering sources, Discovery® systems can process relatively large samples and...
The DV-502B system rapidly cycles between atmosphere and high vacuum. No Discernable Contamination when preparing samples for Electron Microscopy. Rapid Cycle Times Within three minutes, the DV-502B achieves an ultimate...
The Explorer® offers the widest range of configurations and deposition modalities in the thin film industry: Electron beam evaporation, resistance evaporation, sputtering, ion plating, and ion assisted deposition. Able to...
The Helios is Denton Vacuum’s batch production PECVD system. The Helios has the ability to handle substrates up to 31" x 61" with easy access doors on both sides. Features...
The Integrity® series is Denton Vacuum's flagship system to produce optical coatings. These systems range in size from 26" to 80+" and all utilize evaporation technology as the deposition modality.
The Phoenix 400 inline series represents one of Denton Vacuum's offerings for research, pilot-scale as well as continuous production sputtering systems. Utilizing a unique transport system for the substrate carriers,...
The Phoenix is a turnkey multi-cathode DC / RF magnatron sputtering system capable of handling high throughput production environments Cathodes up to 60" Long Multi-Chamber, Multi-Process Design Available in vertical...