The addition of the Voyager to Denton Vacuum's range of deposition platforms provides the thin film specialist with the ability to deposit a variety of films previously difficult to produce due to the geometry of the part or the extended deposition period required. The Voyager utilizes proven hardware configurations developed by Denton Vacuum. The result is a robust mechanical package supported by established controls for ease of operation and intuitive recipe building.
Designed to meet the thin film industry’s requirements for conformal coatings, low temperature processing and high intrinsic uniformity, the Voyager offers Plasma Enhanced Chemical Vapor Deposition on a convenient platform.
Benefits of PECVD processes include an unlimited source of deposition material and the ability to produce defined stresses in the film.
Powerful Control System available in semi-manual mode or in fully automatic mode with one push automation to reduce system downtime.
Process Pro Upgrade Offers:
Consistent controls across all Denton Vacuum Products
Standard software makes it easy to support and avoid costly customization fees
Source code for your programs so you can customize your programs.
Network capabilities makes the discovery a node on your network enabling real-time, remote support and upgrades.
Convenient Access to Subsystems Rear or bottom mounted pumps provide easy access for service based on your workspace needs
Multiple Pumping Configurations A variety of diffusion, cryogenic, and turbo pump configurations are available to fit your budget and process. Rear or bottom fitted pumps provide easy access for service based on your workspace needs.
Typical Applications
PECVD
Materials Research
Small Batch Systems
3D Objects
Coat a Variety of Materials
Sputtering
Process Development
Hard Coatings
Amorphous Si
Optical Interference Coatings
Semiconductor & MEMs Interlayer Dielectric Passivation Layers
Common Deposition Materials
TiN
SiO2
SiN
TiO2
DLC
The addition of the Voyager to Denton Vacuum's range of deposition platforms provides the thin film specialist with the ability to deposit a variety of films previously difficult to produce due to the geometry of the part or the extended deposition period required. The Voyager utilizes proven hardware configurations developed by Denton Vacuum. The result is a robust mechanical package supported by established controls for ease of operation and intuitive recipe building.
Designed to meet the thin film industry’s requirements for conformal coatings, low temperature processing and high intrinsic uniformity, the Voyager offers Plasma Enhanced Chemical Vapor Deposition on a convenient platform.
Benefits of PECVD processes include an unlimited source of deposition material and the ability to produce defined stresses in the film.
Powerful Control System available in semi-manual mode or in fully automatic mode with one push automation to reduce system downtime.
Process Pro Upgrade Offers:
- Consistent controls across all Denton Vacuum Products
- Standard software makes it easy to support and avoid costly customization fees
- Source code for your programs so you can customize your programs.
- Network capabilities makes the discovery a node on your network enabling real-time, remote support and upgrades.
Convenient Access to Subsystems
Rear or bottom mounted pumps provide easy access for service based on your workspace needs
Multiple Pumping Configurations
A variety of diffusion, cryogenic, and turbo pump configurations are available to fit your budget and process. Rear or bottom fitted pumps provide easy access for service based on your workspace needs.
Typical Applications
PECVD
- Materials Research
- Small Batch Systems
- 3D Objects
- Coat a Variety of Materials
Sputtering
- Process Development
- Hard Coatings
- Amorphous Si
- Optical Interference Coatings
- Semiconductor & MEMs Interlayer Dielectric Passivation Layers
Common Deposition Materials
