The Discovery® HDG Ion Beam Deposition and Etch Platform The Discovery HDG provides a turnkey system for a range of processes: Ion Beam Deposition, Ion Beam Assisted Deposition, Ion Beam Etch, Reactive Ion Etch. Features
Cool Substrate During Process
Tilting to Off Axis Angles
Rotation to 20 RPM
Powerful Control System available in semi-manual mode or in fully automatic mode with one push automation to reduce system downtime.
Process Pro Upgrade Offers:
Consistent controls across all Denton Vacuum Products
Standard software makes it easy to support and avoid costly customization fees
Source code for your programs so you can customize your programs.
Network capabilities makes the discovery a node on your network enabling real-time, remote support and upgrades.
Convenient Access to Subsystems Rear or bottom mounted pumps provide easy access for service based on your workspace needs
Multiple Pumping Configurations A variety of cryogenic, mechanical and turbo pump configurations are available to fit your budget and process.
Typical Applications
Nanotechnology
Electronics
Semiconductor (Compound or Other)
Materials Research
Research & Development
Medical Devices
Precision Milling
Via Etching
The Discovery® HDG
Ion Beam Deposition and Etch Platform
The Discovery HDG provides a turnkey system for a range of processes: Ion Beam Deposition, Ion Beam Assisted Deposition, Ion Beam Etch, Reactive Ion Etch.
Features
- Cool Substrate During Process
- Tilting to Off Axis Angles
- Rotation to 20 RPM
Powerful Control System available in semi-manual mode or in fully automatic mode with one push automation to reduce system downtime.
Process Pro Upgrade Offers:
- Consistent controls across all Denton Vacuum Products
- Standard software makes it easy to support and avoid costly customization fees
- Source code for your programs so you can customize your programs.
- Network capabilities makes the discovery a node on your network enabling real-time, remote support and upgrades.
Convenient Access to Subsystems
Rear or bottom mounted pumps provide easy access for service based on your workspace needs
Multiple Pumping Configurations
A variety of cryogenic, mechanical and turbo pump configurations are available to fit your budget and process.
Typical Applications
- Nanotechnology
- Electronics
- Semiconductor (Compound or Other)
- Materials Research
- Research & Development
- Medical Devices
- Precision Milling
- Via Etching
