The Helios is Denton Vacuum’s batch production PECVD system. The Helios has the ability to handle substrates up to 31" x 61" with easy access doors on both sides.
Features
Batch Process
Handles Substrates up to 31" x 61"
Doors open on both ends for easy access
High Quality Stainless Steel or Aluminum Chambers
Harsh Duty Dry Pump for Process Gases
Fully Automated, State of the Art Process Control
Real Time Remote Monitoring
Clean Room Compatible
Turbomolecular Pumping
Powerful Control System available in semi-manual mode or in fully automatic mode with one push automation to reduce system downtime.
Process Pro Upgrade Offers:
Consistent controls across all Denton Vacuum Products
Standard software makes it easy to support and avoid costly customization fees
Source code for your programs so you can customize your programs.
Network capabilities makes the discovery a node on your network enabling real-time, remote support and upgrades.
Typical Applications
PECVD
Materials Research
Large Batch Production
3D Objects
Coat a Variety of Materials
The Helios is Denton Vacuum’s batch production PECVD system. The Helios has the ability to handle substrates up to 31" x 61" with easy access doors on both sides.
Features
- Batch Process
- Handles Substrates up to 31" x 61"
- Doors open on both ends for easy access
- High Quality Stainless Steel or Aluminum Chambers
- Harsh Duty Dry Pump for Process Gases
- Fully Automated, State of the Art Process Control
- Real Time Remote Monitoring
- Clean Room Compatible
- Turbomolecular Pumping
Powerful Control System available in semi-manual mode or in fully automatic mode with one push automation to reduce system downtime.
Process Pro Upgrade Offers:
- Consistent controls across all Denton Vacuum Products
- Standard software makes it easy to support and avoid costly customization fees
- Source code for your programs so you can customize your programs.
- Network capabilities makes the discovery a node on your network enabling real-time, remote support and upgrades.
Typical Applications
PECVD
- Materials Research
- Large Batch Production
- 3D Objects
- Coat a Variety of Materials
