The Discovery® series represents Denton Vacuum's offerings in pilot-scale sputtering systems. Utilizing a unique orientation of the sample to the sputtering sources, Discovery® systems can process relatively large samples and achieve remarkable thickness uniformity using small ion beam sputter deposition sources. This arrangement results in low target inventory costs and allows the system to be constructed with smaller sputtering power supplies, significantly lowering both the acquisition and operating costs of the delivered system.
Flexible Cathode Configurations The Discovery® accommodates up to 8 cathodes with triaxis adjustment of radius, distance, and angular presentation to provide <+/-5% coating uniformity. Each cathode can be optimized for a different deposition process and target matter. Independent electro-pneumatic source shutters and chimney assemblies prevent cross contamination of the source material.
Powerful Control System available in semi-manual mode or in fully automatic mode with one push automation to reduce system downtime.
Process Pro Upgrade Offers:
Consistent controls across all Denton Vacuum Products
Standard software makes it easy to support and avoid costly customization fees
Source code for your programs so you can customize your programs.
Network capabilities makes the discovery a node on your network enabling real-time, remote support and upgrades.
Large Load Locks automated to handle substrates as large as 30" in diameter and as heavy as 50 lbs.
Multiple Pumping Configurations A variety of diffusion, cryogenic, and turbo pump configurations are available to fit your budget and process. Rear or bottom fitted pumps provide easy access for service based on your workspace needs.
Typical Applications
Sputtering
Pilot Production
Optical Coatings
Metal Coatings
Nanotechnology
OLEDs
Protective Coatings
The Discovery® series represents Denton Vacuum's offerings in pilot-scale sputtering systems. Utilizing a unique orientation of the sample to the sputtering sources, Discovery® systems can process relatively large samples and achieve remarkable thickness uniformity using small ion beam sputter deposition sources. This arrangement results in low target inventory costs and allows the system to be constructed with smaller sputtering power supplies, significantly lowering both the acquisition and operating costs of the delivered system.
Flexible Cathode Configurations
The Discovery® accommodates up to 8 cathodes with triaxis adjustment of radius, distance, and angular presentation to provide <+/-5% coating uniformity. Each cathode can be optimized for a different deposition process and target matter.
Independent electro-pneumatic source shutters and chimney assemblies prevent cross contamination of the source material.
Powerful Control System available in semi-manual mode or in fully automatic mode with one push automation to reduce system downtime.
Process Pro Upgrade Offers:
- Consistent controls across all Denton Vacuum Products
- Standard software makes it easy to support and avoid costly customization fees
- Source code for your programs so you can customize your programs.
- Network capabilities makes the discovery a node on your network enabling real-time, remote support and upgrades.
Large Load Locks automated to handle substrates as large as 30" in diameter and as heavy as 50 lbs.
Multiple Pumping Configurations
A variety of diffusion, cryogenic, and turbo pump configurations are available to fit your budget and process. Rear or bottom fitted pumps provide easy access for service based on your workspace needs.
Typical Applications
Sputtering
- Pilot Production
- Optical Coatings
- Metal Coatings
- Nanotechnology
- OLEDs
- Protective Coatings
