The Phoenix is a turnkey multi-cathode DC / RF magnatron sputtering system capable of handling high throughput production environments
Cathodes up to 60" Long
Multi-Chamber, Multi-Process Design Available in vertical or horizontal configurations to best utilize your production requirements, floor space, and workflow.
Scalable The modular design allows you to easily increase production capabilities or add deposition technologies as your requirements change.
Powerful Control System available in semi-manual mode or in fully automatic mode with one push automation to reduce system downtime.
Process Pro Upgrade Offers:
Consistent controls across all Denton Vacuum Products
Standard software makes it easy to support and avoid costly customization fees
Source code for your programs so you can customize your programs.
Network capabilities makes the discovery a node on your network enabling real-time, remote support and upgrades.
Multiple Pumping Configurations A variety of diffusion, cryogenic, and turbo pump configurations are available to fit your budget and process. Rear or bottom fitted pumps provide easy access for service based on your workspace needs.
Typical Applications
PECVD
Materials Research
Small Batch Systems
3D Objects
Coat a Variety of Materials
Sputtering
Process Development
Hard Coatings
Semiconductor & MEMs Interlayer Dielectric Passivation Layers
Production
Nanotechnology
Medical Devices
OLEDs
Protective Coatings
The Phoenix is a turnkey multi-cathode DC / RF magnatron sputtering system capable of handling high throughput production environments
Cathodes up to 60" Long
Multi-Chamber, Multi-Process Design Available in vertical or horizontal configurations to best utilize your production requirements, floor space, and workflow.
Scalable
The modular design allows you to easily increase production capabilities or add deposition technologies as your requirements change.
Powerful Control System available in semi-manual mode or in fully automatic mode with one push automation to reduce system downtime.
Process Pro Upgrade Offers:
- Consistent controls across all Denton Vacuum Products
- Standard software makes it easy to support and avoid costly customization fees
- Source code for your programs so you can customize your programs.
- Network capabilities makes the discovery a node on your network enabling real-time, remote support and upgrades.
Multiple Pumping Configurations
A variety of diffusion, cryogenic, and turbo pump configurations are available to fit your budget and process. Rear or bottom fitted pumps provide easy access for service based on your workspace needs.
Typical Applications
PECVD
- Materials Research
- Small Batch Systems
- 3D Objects
- Coat a Variety of Materials
Sputtering
- Process Development
- Hard Coatings
- Semiconductor & MEMs Interlayer Dielectric Passivation Layers
- Production
- Nanotechnology
- Medical Devices
- OLEDs
- Protective Coatings
