The Integrity® series is Denton Vacuum's flagship system to produce optical coatings. These systems range in size from 26" to 80+" and all utilize evaporation technology as the deposition modality. Most, if not all of these vacuum deposition systems are equipped with sources for ion beam assisted deposition and optical monitors are employed for the highest precision applications. The high end process requirements of this product line demand the highest levels of system automation. Typical applications include anti-reflection coatings, narrow band-pass filters, high/low pass filters, hot/cold mirrors and color correcting mirrors. All Integrity systems can be optomized for depositing metals.
Standard or custom configurations enable you to select a configuration that meets your budget and process requirements.
Powerful Control System available in semi-manual mode or in fully automatic mode with one push automation to reduce system downtime.
Process Pro Upgrade Offers:
Consistent controls across all Denton Vacuum Products
Standard software makes it easy to support and avoid costly customization fees
Source code for your programs so you can customize your programs.
Network capabilities makes the discovery a node on your network enabling real-time, remote support and upgrades.
Convenient Access to Subsystems Rear or bottom mounted pumps provide easy access for service based on your workspace needs
Multiple Pumping Configurations A variety of diffusion, cryogenic, and turbo pump configurations are available to fit your budget and process. Rear or bottom fitted pumps provide easy access for service based on your workspace needs.
Typical Applications
PECVD
UV - VIS - IR Coatings
Low Moisture Shift Dielectrics
Protective Topcoats
Ion Assisted Processes
Hi / Lo Pass Filters
Hot / Cold Mirrors
Narrow Band Pass Filters
Color Correcting Mirrors
Anti-Reflection Coatings
The Integrity® series is Denton Vacuum's flagship system to produce optical coatings. These systems range in size from 26" to 80+" and all utilize evaporation technology as the deposition modality. Most, if not all of these vacuum deposition systems are equipped with sources for ion beam assisted deposition and optical monitors are employed for the highest precision applications. The high end process requirements of this product line demand the highest levels of system automation. Typical applications include anti-reflection coatings, narrow band-pass filters, high/low pass filters, hot/cold mirrors and color correcting mirrors. All Integrity systems can be optomized for depositing metals.
Standard or custom configurations enable you to select a configuration that meets your budget and process requirements.
Powerful Control System available in semi-manual mode or in fully automatic mode with one push automation to reduce system downtime.
Process Pro Upgrade Offers:
- Consistent controls across all Denton Vacuum Products
- Standard software makes it easy to support and avoid costly customization fees
- Source code for your programs so you can customize your programs.
- Network capabilities makes the discovery a node on your network enabling real-time, remote support and upgrades.
Convenient Access to Subsystems
Rear or bottom mounted pumps provide easy access for service based on your workspace needs
Multiple Pumping Configurations
A variety of diffusion, cryogenic, and turbo pump configurations are available to fit your budget and process. Rear or bottom fitted pumps provide easy access for service based on your workspace needs.
Typical Applications
PECVD
- UV - VIS - IR Coatings
- Low Moisture Shift Dielectrics
- Protective Topcoats
- Ion Assisted Processes
- Hi / Lo Pass Filters
- Hot / Cold Mirrors
- Narrow Band Pass Filters
- Color Correcting Mirrors
- Anti-Reflection Coatings
