Piezosystem Jena, Inc. Compact Multi Dimensional Translation Stage TRITOR 50

TRITOR 50 CAP highly compact design with integrated feedback sensor accurate parallel motion by parallelogram design high reliability and linearity due to solid state hinges motion without mechanical play high resolution in nm and sub-nm range motion up to 50 µm precision pin holes The piezoactuator TRITOR 50 CAP combines the advantages of a very compact size with the positioning accuracy of a capacitive regulated system. The system offers motion of 50 µm in all three axes. Due to FEA-optimization, this stagemeets the highest dynamical performance and has excellent guiding accuracy. The nanopositioner TRITOR 50 CAP features very high positioning accuracy and repeatability. Parallel motion is achieved without play because of the mechanical design.