PI (Physik Instrumente) L.P. Piezo Hexapod P-915KWEF

This miniature hexapod was designed for dynamic error correction in all degrees of freedom. It can be added or integrated into long travel positioning systems to improve motion accuracy limited by guiding errors or external forces, such as those found in machining processes. Due to its very stiff design with piezo direct drives and capacitance direct metrology feedback, it is capable of delivering repeatable motion with the identical dynamics and accuracy in all linear and rotary axes and with its sophisticated vector controller can run high-precision trajectories with the very high dynamics. Very Stiff Design, 1 kHz natural frequency, high dynamics 6 axis system: XYZ and rotation (x,y,z) Resolution 1 nm linear / 0.07 µrad rotary Positioning range up to 70 µm Direct sensing capacitance sensors for closed-loop operation Space-saving, parallel-kinematics design for integration Wear-free piezo drives, operate in strong magnetic fields / high vacuum