PI (Physik Instrumente) L.P. PIglide AT3 Linear Air Bearing Stage A-123

The PIglide AT3 series of stages are linear servo motor driven with fully preloaded air bearings and an integral optical linear encoder. The combination of these non-contact components results in a frictionless motion platform that offers the highest performance, quality, and life. These stages are ideally suited for many high precision applications, such as metrology, photonics alignment, semiconductor inspection, flat panel display, laser machining, and precision scanning applications. The non-contact design also makes these stages ideal for cleanroom applications. A high-force linear motor can drive the stage to top speed within a few milliseconds, and the large capacity bearings can support payloads up to 35 kg. The laterally opposed, actively preloaded air bearing design in this model will support normal, vertical, and side-mounted orientations. Travel to 750mm Table Size to 210mm x 210mm Load to 35kg Velocity to 1 m/s, Acceleration to 3g’s Straightness/Flatnes s < 0.1µm / 25mm Resolution to 1nm