VAT, Inc. Datasheets for Vacuum Valves
Vacuum valves are used when a vacuum must be maintained in a closed system.
Vacuum Valves: Learn more
| Product Name | Notes |
|---|---|
| All-metal angle valve with patented VATRING sealing system. Used as isolation valves in UHV and extreme UHV systems. Manual actuator (hexagon head, inner-square or handwheel). The manual closing movement ends... | |
| All-metal angle valves with patented VATRING sealing system. Used as isolation valves in UHV and extreme UHV systems. Available with manual actuator (hexagon head), double acting pneumatic actuator or spring... | |
| All-metal gate valves with patented VATRING sealing system. Used as isolation valves in UHV and extreme UHV systems. Available with manual actuator or with extended or compact double acting pneumatic... | |
| Analysis of the residual gases at base pressure with the gate valve open. Line of sight between analyzer and process chamber. With bypass valves Pressure reduction of the process gas... | |
| Analysis of the residual gases at base pressure with the gate valve open. Very compact. Gate valve: see section «A», Mini UHV gate valves Series 010. Bypass valves exchangeable: type... | |
| Butterfly pressure control valves for downstream applications. Very fast and strong actuator. Powerful integrated controller. Automatic maintenance indication. | |
| DN 16 - 100. These products are subject to the Non Proliferation Treaty (NPT). Control and leaktight closing. Selection of flow range by replaceable needle/nozzle unit. Increased safety by evacuation... | |
| DN 25 - 160. These products are subject to the Non Proliferation Treaty (NPT). Body made of aluminum or stainless steel. Bellows feedthrough with additional shaft seal for safety. | |
| Fast closing slot shutter for protecting storage rings of synchrotrons and particle accelerators from air inrush. Closing to a small leak in milliseconds. For UHV and extreme UHV systems. Electropneumatic... | |
| High vacuum angle valve with bellows feedthrough and large conductance. Features Modular design Robust, compact Easy cleaning | |
| High vacuum angle valves with bellows feedthrough. Modular design. Features Modular design Very low outgassing rate due to body machined from extruded aluminum Easy cleaning | |
| High vacuum inline valve with bellows feedthrough and large conductance. Differential pressure resistant | |
| Inline valve with shaft feedthrough for large gas flows. Features Modular design Robust, compact Easy cleaning | |
| Insertable gate valves are space saving due to direct mounting between DIN flanges. Features Flanges with DIN centering insert VATLOCK configuration | |
| Manually operated diaphragm valves with forged body and robust actuator. Features Diaphragm made of FKM (VITON) Easy replacement of the diaphragm | |
| Mini vacuum gate valves are small, light-weight and low-priced. Features VATLOCK configuration O-ring shaft seal Vulcanized gate seal | |
| Mini-UHV-gate valves are for many applications. They can be provided with various actuators. The mechanism is free of lubricants. Features MONOVAT configuration Bellows-sealed Mechanism free of lubricants | |
| Offers reduced turbulence during initial pump down giving low particle count. Adjustable soft-pump opening to reduce the turbulences during pump-down and venting | |
| Pressure control and isolation valves with extended control range, based on the pendulum principle. For downstream applications. Compared to Series 650, Series 651 achieves considerably shorter pressure rise times at... | |
| Soft-start valves consist of two halves of throttle flaps supported on a common axis and maintained in the open position by a spring. The axis is held in an ISO-KF... | |
| Standard HV inline valve with bellows feedthrough. For large gas flows we recommend Series 24. Features Modular design Robust, compact Easy cleaning | |
| The HV stainless steel gate valve with bellows is designed for harsh process conditions. The grease free wedge valve design allows multiple differential pressure (1 bar) openings even in a... | |
| The key features of the MONOVAT valve technology are the proven three-dimensional sealing technology, low particle and shock generation, modular design enables easy up scaling and compact outside dimensions. By... | |
| The key features of the SolVAT technology are the robust mechanism design which can withstand harsh environment, low cost of owner ship and modular design enables easy upscaling. By a... | |
| The key features of the XL-VAT technology are the fast and simple maintenance, low cost of ownership, adjustable sealing force on gate seal and modular design enables easy upscaling. By... | |
| The new pendulum valves are the successors of the previous Series 165 valves. The series 16.2 is designed for demanding corrosive processes such as CVD and ETCH. Although featuring the... | |
| These gate valves are well suited for vacuum systems requiring extremely low particle count and virtually shock-free operation. Modular design: configurable for vacuum, high vacuum, corrosive processes, etc. | |
| These gate valves are well suited for vacuum systems requiring extremely low particle count and virtually shock-free operation. Modular design: configurable for vacuum, high vacuum, corrosive processes, etc | |
| These HV gate valves are well suited for process systems. Key features are compactness, high cycle life due to the rotary feedthrough, proved VATLOCK sealing principle, six possible actuator positions,... | |
| These large pendulum valves are for many applications. Besides the main field of application - FPD (Flat Panel Display) production systems - they are often used in the coating industry. | |
| These low-cost gate valves are designed for very easy maintenance. Features High quality shaft feedthrough VATLOCK configuration Low shock during operation | |
| These standard UHV gate valves are for many applications. They are bellows sealed and their mechanism is free of lubricants. The approved VATLOCK sealing principle ensures a virtually shock-free locking. | |
| These valves are for various applications. Mostly, they are used for vacuum pump isolation (cryo pumps, oil diffusion pumps). Features Proved VATLOCK configuration Assembly in cleanroom according to UHV quality... | |
| Transfer insert-valves for load lock / process module isolation. The inserts work virtually particle and vibration-free. Outstanding up-time: more than 5 million cycles between maintenance. Valve installation from the top. | |
| Transfer valves for load lock / process module isolation. The valves work virtually particle and vibration-free. Outstanding up-time: more than 5 million cycles between maintenance. | |
| Vacuum angle valves with shaft feedthrough. No actuator parts in the vacuum. Therefore, low particle. Modular design. Angle valve with shaft feedthrough for large gas flows | |
| Vatterfly valves designed for a high conductance. No mechanism in the vacuum. Pneumatic actuator, with rotary feedthrough For contaminating and aggressive applications, mechanism in the actuator Compact alternative to gate... | |
| Vatterfly valves with extended body designed for a high conductance. No mechanism in the vacuum. Pneumatic actuator, with rotary feedthrough For contaminating and aggressive applications, mechanism in the actuator Compact... | |
| Area of application: In UHV and extreme UHV systems for protecting experiments from beam load up to max. 6 kW. Description: Beam stopper without body for direct integration... | |
| Area of application: In UHV and extreme UHV systems for protecting experiments from beam load up to max. 6 kW. Description: Beam stoppers for protecting experiments from beam... | |
| Area of application: Semiconductors, FPD and industrial processes, particularly CVD systems. Description: Downstream pressure control and isolation valve Compact design Fast operation High-performance, integrated controller Low minimum controllable... | |
| Area of application: Stainless steel bellows sealed High Vacuum Gate Valve for pump isolation applications Description: Stainless steel bellows sealed High Vacuum Gate Valve for pump isolation applications... |