Offers reduced turbulence during initial pump down giving low particle count.
Adjustable soft-pump opening to reduce the turbulences during pump-down and venting
| VAT, Inc. | |
|---|---|
| Product Category | Vacuum Valves |
| Product Number | Series 290 |
| Product Name | Soft-Pump Angle Valve (DN 63-160) |
| Type | Angle |
| Port OD | 2.5 to 6 inch (63.5 to 152 mm) |
| Vacuum / Pressure Range | (UHV, < 10-8 torr); Elevated or positive pressures (>> 760 torr) |
| Temperature Range | 302 F (150 C) |
| Port Flange & Seal Type | Elastomeric / O-ring; ISO flange; ISO-KF (Small Clamped, <2") |
