The new pendulum valves are the successors of the previous Series 165 valves. The series 16.2 is designed for demanding corrosive processes such as CVD and ETCH. Although featuring the same proved sealing principle and quality as the previous types, they are lower-priced. Further features are low particle count and quick and easy cleaning.
| VAT, Inc. | |
|---|---|
| Product Category | Vacuum Valves |
| Product Number | Series 162 |
| Product Name | New Version Pendulum Valve |
| Type | Pendulum |
| Port OD | 2.5 to 16 inch (63.5 to 406 mm) |
| Vacuum / Pressure Range | (UHV, < 10-8 torr); Elevated or positive pressures (>> 760 torr) |
| Temperature Range | 248 F (120 C) |
| Port Flange & Seal Type | Elastomeric / O-ring; ASA; ISO flange |
