High vacuum angle valve with bellows feedthrough and large conductance.
High vacuum angle valves with bellows feedthrough. Modular design.
| VAT, Inc. | VAT, Inc. | |
|---|---|---|
| Product Category | Vacuum Valves | Vacuum Valves |
| Product Number | Series 264 | Series 264 |
| Product Name | HV Angle Valve (Electromagn. Actuator) | HV Angle Valve (DN 10-80) |
| Type | Angle | Angle |
| Port OD | 0.3750 to 1.5 inch (9.52 to 38.1 mm) | 0.3750 to 3 inch (9.52 to 76.2 mm) |
| Vacuum / Pressure Range | (HV, < 10-3, >10-8 torr); Elevated or positive pressures (>> 760 torr) | (HV, < 10-3, >10-8 torr); Elevated or positive pressures (>> 760 torr) |
| Temperature Range | 122 F (50 C) | 302 F (150 C) |
| Port Flange & Seal Type | Elastomeric / O-ring; ISO flange; ISO-KF (Small Clamped, <2") | Elastomeric / O-ring; ISO flange; ISO-KF (Small Clamped, <2") |
