Linde North America, Inc. Datasheets for Electronic and Semiconductor Gases

Electronic and semiconductor gases are specialized for microelectronic manufacturing or semiconductor processing applications such as thin film deposition (CVD, PVD), etching, RTP, packaging or soldering.
Electronic and Semiconductor Gases: Learn more

Product Name	Notes
Excimer Laser Gases -- Argon	Argon is a rare atmospheric gas which is colorless, odorless, tasteless, and nontoxic. It is considered extremely inert and forms no known chemical compounds. The concentration of argon gas in...
Bulk Industrial Gases -- Argon	Argon is used because of its inert properties for protection against the oxidizing effect of air. Argon is widely used as a blanketing or shielding gas in metallurgy and arc...
Specialty Gases & Chemicals	At Linde, innovation is not just a word, but a passionate pursuit and foundation for our success. We believe in continuously improving existing products by creating better chemicals and gases...
Fuel Gases -- Hydrogen	Hydrogen (H2) is an odourless, colourless and tasteless gas that is produced through natural gas steam reforming or the electrolysis of water. Lighter than air, it burns with an invisible,...
Bulk Industrial Gases -- Hydrogen Chloride	Hydrogen Chloride (HCl) is an inorganic chemical with many applications. It is used in chemical synthesis reactions to produce vinyl chloride, fertilizers, dyes, pigments, and pharmaceutical ingredients. It also finds...
Bulk Industrial Gases -- Hydrogen	Hydrogen is used in vast quantities as a raw material for production of ammonia, methanol, hydrogen peroxide, polymers and solvents. It is also used to hydrogenate many animal or vegetable...
Bulk Electronic Special Gases -- Nitrogen trifluoride Bulk Electronic Special Gases -- Silane	If cylinders are not sufficient to meet your requirements for critical electronic special gases, we have the answer. We can deliver bulk gases by road tanker or ISO container to...
Sheilding Gas -- Argon	Linde has been a quality supplier of Medical Gases, mixtures and equipment for over 50 years. Linde supplies a full line of gases for therapy, calibration, biological culture growth and...
Deuterium	Semiconductor Grade: ≥99.999+% † Isotopic Enrichment: >99.75 atom% † Chemical purity is exclusive of hydrogen and deuterium hydride Deuterium is also known as “heavy hydrogen” due to the added mass...
Electronic Special Gas -- Ammonia (NH3) Electronic Special Gas -- Argon (Ar) Electronic Special Gas -- Arsine (AsH3) Electronic Special Gas -- Boron trichloride (BCl3) Electronic Special Gas -- Boron-11 trifluoride (11BF3) Electronic Special Gas -- Carbon dioxide (CO2) Electronic Special Gas -- Carbon monoxide (CO) Electronic Special Gas -- Chlorine (Cl2) Electronic Special Gas -- Chlorine trifluoride (ClF3) Electronic Special Gas -- Diborane (B2H6) Electronic Special Gas -- Dichlorosilane (SiH2Cl2) Electronic Special Gas -- Diethylzinc (DEZ) Electronic Special Gas -- Disilane (Si2H6) Electronic Special Gas -- Enriched Diborane (11B2H6) Electronic Special Gas -- Fluorine (F2) Electronic Special Gas -- Germane (GeH4) Electronic Special Gas -- Halocarbon 116 (C2F6) Electronic Special Gas -- Halocarbon 14 (CF4) Electronic Special Gas -- Halocarbon 1418 (C5F8) Electronic Special Gas -- Halocarbon 218 (C3F8) Electronic Special Gas -- Halocarbon 23 (CHF3) Electronic Special Gas -- Halocarbon 2316 (C4F6) Electronic Special Gas -- Halocarbon 318 (C4F8) Electronic Special Gas -- Halocarbon 32 (CH2F2) Electronic Special Gas -- Halocarbon 41 (CH3F) Electronic Special Gas -- Helium (He) Electronic Special Gas -- Hexachlorodisilane (Si2Cl6) Electronic Special Gas -- Hydrogen (H2) Electronic Special Gas -- Hydrogen bromide (HBr) Electronic Special Gas -- Hydrogen chloride (HCl) Electronic Special Gas -- Hydrogen fluoride (HF) Electronic Special Gas -- Hydrogen selenide (H2Se) Electronic Special Gas -- Hydrogen sulphide (H2S) Electronic Special Gas -- Monomethylsilane (MMS) Electronic Special Gas -- Nitric oxide (NO) Electronic Special Gas -- Nitrogen (N2) Electronic Special Gas -- Nitrogen trifluoride (NF3) Electronic Special Gas -- Nitrous oxide (N2O) Electronic Special Gas -- Oxygen (O2) Electronic Special Gas -- Phosphine (PH3) Electronic Special Gas -- Silane (SiH4) Electronic Special Gas -- Silicon tetrafluoride (SiF4) Electronic Special Gas -- Sulphur hexafluoride (SF6) Electronic Special Gas -- Trichlorosilane (SiHCl3) Electronic Special Gas -- Trimethyl-Boron (TMB) Electronic Special Gas -- Trimethylsilane (3MS) Electronic Special Gas -- Trisilane (Si3H8) Electronic Special Gas -- Tungsten hexafluoride (WF6)	The Linde group is the world’s largest producer of high purity isotopic electronic gases such as deuterium (2H2), deuterated silane (Si2H4), deuterated ammonia (N2H3), and 11-Boron Trifluoride (11BF3). For information...

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