MTI Instruments Inc. Datasheets for Semiconductor Metrology Instruments

Semiconductor metrology instruments are designed for wafer and thin film in-line inspection after semiconductor processing. They include capacitance gages, C-V systems, electron beam probes, ellipsometers, interferometers, I-V system, magnetometers, optical systems, profilometers, reflectometers, resistance probes, RHEED systems, and X-ray diffractometers.  
Semiconductor Metrology Instruments: Learn more

Product Name Notes
Semiconductor Metrology System -- Proforma™ 300Gi
Semiconductor Metrology System -- Proforma™ 300i
The Proforma 300i wafer thickness gage is a capacitance based, differential measurement system that performs non-contact thickness measurements of semiconducting and semi-insulating wafers. By utilizing MTI Push/Pull technology, the Proforma...
Semi-Automated Wafer Measurement System -- Proforma™ 300SA The Proforma 300SA is a benchtop/desktop, semi-automated wafer measurement system for semi-conducting and semi-insulating materials. Based on MTII’s exclusive Push-Pull capacitance technology, the Proforma 300SA delivers full wafer surface scanning...