MTI Instruments Inc. Semiconductor Metrology System Proforma™ 300Gi

Description
The Proforma 300i wafer thickness gage is a capacitance based, differential measurement system that performs non-contact thickness measurements of semiconducting and semi-insulating wafers. By utilizing MTI Push/Pull technology, the Proforma 300i does not require the wafers to have a consistent electrical ground resulting in exceptional accuracy and repeatability for most wafer types. The Proforma 300i system includes full remote control operating software and Ethernet network interface capability. *Gallium-Arsenide requires probe reconfiguration for semi-insulating materials over 10K-Ohm cm bulk resistance Features Front USB port enables easy data storage to flash drives MTI Instruments’ Proprietary Capacitance Circuitry for Outstanding Accuracy and Dependability Non-contact Measurements 76-300 mm Diameter Wafer Range Optional wafer measurement rings Wafer stops for exact centering Ethernet interface Full remote control software (Windows compatible) Optional calibration wafers
Datasheet
Description
The Proforma 300i wafer thickness gage is a capacitance based, differential measurement system that performs non-contact thickness measurements of semiconducting and semi-insulating wafers. By utilizing MTI Push/Pull technology, the Proforma 300i does not require the wafers to have a consistent electrical ground resulting in exceptional accuracy and repeatability for most wafer types. The Proforma 300i system includes full remote control operating software and Ethernet network interface capability. *Gallium-Arsenide requires probe reconfiguration for semi-insulating materials over 10K-Ohm cm bulk resistance Features Front USB port enables easy data storage to flash drives MTI Instruments’ Proprietary Capacitance Circuitry for Outstanding Accuracy and Dependability Non-contact Measurements 76-300 mm Diameter Wafer Range Optional wafer measurement rings Wafer stops for exact centering Ethernet interface Full remote control software (Windows compatible) Optional calibration wafers
Datasheet

Suppliers

Company
Product
Description
Supplier Links
Semiconductor Metrology System - Proforma™ 300Gi - MTI Instruments Inc.
Albany, NY, USA
Semiconductor Metrology System
Proforma™ 300Gi
Semiconductor Metrology System Proforma™ 300Gi
The Proforma 300i wafer thickness gage is a capacitance based, differential measurement system that performs non-contact thickness measurements of semiconducting and semi-insulating wafers. By utilizing MTI Push/Pull technology, the Proforma 300i does not require the wafers to have a consistent electrical ground resulting in exceptional accuracy and repeatability for most wafer types. The Proforma 300i system includes full remote control operating software and Ethernet network interface capability. *Gallium-Arsenide requires probe reconfiguration for semi-insulating materials over 10K-Ohm cm bulk resistance Features Front USB port enables easy data storage to flash drives MTI Instruments’ Proprietary Capacitance Circuitry for Outstanding Accuracy and Dependability Non-contact Measurements 76-300 mm Diameter Wafer Range Optional wafer measurement rings Wafer stops for exact centering Ethernet interface Full remote control software (Windows compatible) Optional calibration wafers

The Proforma 300i wafer thickness gage is a capacitance based, differential measurement system that performs non-contact thickness measurements of semiconducting and semi-insulating wafers. By utilizing MTI Push/Pull technology, the Proforma 300i does not require the wafers to have a consistent electrical ground resulting in exceptional accuracy and repeatability for most wafer types. The Proforma 300i system includes full remote control operating software and Ethernet network interface capability.

*Gallium-Arsenide requires probe reconfiguration for semi-insulating materials over 10K-Ohm cm bulk resistance

Features

  • Front USB port enables easy data storage to flash drives
  • MTI Instruments’ Proprietary Capacitance Circuitry for Outstanding Accuracy and Dependability
  • Non-contact Measurements
  • 76-300 mm Diameter Wafer Range
  • Optional wafer measurement rings
  • Wafer stops for exact centering
  • Ethernet interface
  • Full remote control software (Windows compatible)
  • Optional calibration wafers
Supplier's Site Datasheet

Technical Specifications

  MTI Instruments Inc.
Product Category Wafer and Thin Film Instrumentation
Product Number Proforma™ 300Gi
Product Name Semiconductor Metrology System
Form Factor ProbingSystem; Sensor or sensing element
Mounting / Loading Manual loading
Technology Capacitance or electromagnetic gage
Applications Wafer
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