Hiden Analytical Datasheets for Semiconductor Metrology Instruments
Semiconductor metrology instruments are designed for wafer and thin film in-line inspection after semiconductor processing. They include capacitance gages, C-V systems, electron beam probes, ellipsometers, interferometers, I-V system, magnetometers, optical systems, profilometers, reflectometers, resistance probes, RHEED systems, and X-ray diffractometers.
Semiconductor Metrology Instruments: Learn more
Product Name | Notes |
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Low power, high brightness, surface ionisation source coupled to a compact ion column, providing high performance in a small package. | |
Static and Dynamic SIMSAuger Electron SpectroscopyIon Beam SputteringSurface Science StudiesRastering / Depth Profiling |