JST Manufacturing, Inc. Datasheets for Semiconductor Wet Process Equipment
Semiconductor wet process equipment performs a variety of wet processing applications including etching, washing, chemical mechanical polishing (CMP), and spin coating in semiconductor or microelectronics manufacturing.
Semiconductor Wet Process Equipment: Learn more
| Product Name | Notes |
|---|---|
| JST's ultrasonic baths are designed to make the most of your cleaning chemistry while taking advantage of the cleaning action of the sound waves. Coved corners eliminate particle traps and... | |
| JST's Heated Filtered bath continuously filters process chemicals in a laminar flow direction from the bottom of the bath upward over a four sided weir. The bath is design to... | |
| JST's Ambient Filtration bath continuously filters process chemicals in a laminar flow direction from the bottom of the bath upward over a four sided weir. The bath is designed... | |
| JST's heated downflow baths are designed for metal lift off and removal of heavy particles that have a tendency to fall to the bottom of the tank. Filtered and... | |
| JST's Megasonic Baths provide a high level of cleaning performance by applying high frequency energy (greater than 700 Khz) to effectively remove submicron particles via acoustic cavitation. The high... | |
| JST's Single Wafer Etching and Stripping System utilizes an automated chemical spray process on a single wafer. The system includes oscillating spray nozzles, adjustable wafer speed (RPM) and precision adjustment... | |
| JST offers affordable semi-automated systems in both rotary and linear transfer designs. Rotary Transfer stations can accomodate single or dual rotary arms. JST's robot uses DC servo motors for... | |
| Ambient Static Baths incorporate coved corners for cleanliness and a sloped bottom. JST's Ambient Static Baths incorporate coved corners for cleanliness and a sloped bottom with 3/4" port... | |
| Designed to maintain uniform temperature for processing while meeting NEC and SEMI standards for safety. JST's Static Heated Baths are designed to maintain uniform temperature for processing while meeting... | |
| JST's Quick Dump Rinser supplies Deionized (DI) water from the bottom of the bath through ports that direct the flow up and across the product’s surface. JST's Quick Dump... | |
| JST's two axis, front to back automated system is a compact, semi-automated system for processes that require uniformity without the high price tag. The Tigress is designed to minimize exhaust... | |
| JST's Overflow Rinse baths are slotted on all four sidewalls to provide DI water overflow to the plenum.The inside corners are constructed with coved corner design to minimize particle... | |
| Maintains accurate temperature control and particle removal. JST's Constant Temperature Bath maintains accurate temperature control and particle removal. The recirculated chemistry flow enters the bottom of the process bath,... | |
| JST's Chemical Workstations are designed for use as an exhausted work surface for laboratory applications. Even airflow is provided across the worksurface. The worksurface is liquid tight maintaining a dry... | |
| JST's exhausted Workstations are designed for manual processing of 8" wafers or smaller in a class 100 or better environment. They have been certified to meet SEMI S2 and SEMI... | |
| JST's fumehoods are modular in design and made to provide a safe enviroment when working with volatile chemistries. The fumehood profile encloses the entire work area. A counter balanced front... | |
| JST's Spinner and Hot Plate workstations are designed for ease of use and service. Spinner modules and/or Hot Plate modules are mounted in a sealed deck area with easily accessible... | |
| JST's VLF is designed for manual processing of 6" or smaller wafers in a class 1,000 environment. The headcasing houses the electrical controls and is nitrogen purged. The Emergency Power... | |
| Whether processing 6", 8", or 12" wafers or a combination, JST can design an automated wet process tool to meet your needs. Multiple platforms are available as well as a... | |
| Whether your metal lift off process demands a fully automated process or simply a manual configuration, JST's Lift Off Stations offer dry to dry, cost effective solutions for the removal... |