Nor-Cal Products, Inc. - The Vacuum Experts Datasheets for Wafer and Thin Film Instrumentation

Instruments such as quartz crystal microbalance (QCM) monitors, ellipsometers, RHEED systems, imaging stations, CD-SEMs, ion mills, C-V systems specifically designed for wafer metrology or in-situ monitoring of thin film parameters during thin film or semiconductors wafer processing.
Wafer and Thin Film Instrumentation: Learn more

Product Name Notes
Dual Crystal Sensor
Single Crystal Sensor
Single Crystal Sensor, Beakable
Crystal Sensors are available in single and dual crystal versions. Typically single crystal sensors are used for short runs, with dual crystal sensors being used for longer runs. Dual crystal...
Deposition Monitor, 2 Channels
Deposition Monitor, 6 Channels
Nor-Cal Products Deposition Monitors are used to measure the thin film (deposition) thicknesses, rate of deposition or frequency, in conjunction with the crystal sensor. Models are available which independently monitor...