Palomar Technologies, Inc Datasheets for MEMS Processing Equipment

MEMS processing equipment is used to create micro-electro-mechanical systems (MEMS) sensors and wafers.
MEMS Processing Equipment: Learn more

Product Name Notes
Overview The SST 3150 is a high vacuum furnace that provides advanced packaging capabilities in vacuum levels as low as 10-7 Torr, and temperatures up to 500°C (1000°C optional).