The V-571 family of nano positioning linear stages is specifically designed for applications requiring extreme accuracy and geometric performance. This nano positioning stage excels with 0.5µm straightness and flatness per 50mm travel, along with pitch and yaw of 50µrad and 25µrad, respectively. When calibrated with an A-81x motion controller, the V-571 linear stages achieve guaranteed positioning accuracy of 100nm and bidirectional repeatability of +/-60nm. Applications include sample inspection, precision micro- assembly, semiconductor inspection and metrology, photonics alignment, as well as mass-production of ultra-high precision components.
| PI (Physik Instrumente) L.P. | |
|---|---|
| Product Category | Linear Slides and Linear Stages |
| Product Number | V-571 |
| Product Name | Nanopositioning Linear Stages |
| Axis Configuration | X-Y Axes; X-Y-Z Axes |
| Stroke or X-Axis Travel | 0.9843 to 3.94 inch (25 to 100 mm) |
| Rated Speed | 19.69 in/sec (30 m/min) |
