PI (Physik Instrumente) L.P. Nanopositioning Linear Stages V-571

Description
The V-571 family of nano positioning linear stages is specifically designed for applications requiring extreme accuracy and geometric performance. This nano positioning stage excels with 0.5µm straightness and flatness per 50mm travel, along with pitch and yaw of 50µrad and 25µrad, respectively. When calibrated with an A-81x motion controller, the V-571 linear stages achieve guaranteed positioning accuracy of 100nm and bidirectional repeatability of +/-60nm. Applications include sample inspection, precision micro- assembly, semiconductor inspection and metrology, photonics alignment, as well as mass-production of ultra-high precision components.
  • Nanopositioning Linear Stages - V-571 - PI (Physik Instrumente) L.P.
    PI (Physik Instrumente) L.P.
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Description
The V-571 family of nano positioning linear stages is specifically designed for applications requiring extreme accuracy and geometric performance. This nano positioning stage excels with 0.5µm straightness and flatness per 50mm travel, along with pitch and yaw of 50µrad and 25µrad, respectively. When calibrated with an A-81x motion controller, the V-571 linear stages achieve guaranteed positioning accuracy of 100nm and bidirectional repeatability of +/-60nm. Applications include sample inspection, precision micro- assembly, semiconductor inspection and metrology, photonics alignment, as well as mass-production of ultra-high precision components.
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Nanopositioning Linear Stages - V-571 - PI (Physik Instrumente) L.P.
PI (Physik Instrumente) L.P.
Shrewsbury, MA, United States
Nanopositioning Linear Stages
V-571
Nanopositioning Linear Stages V-571
The V-571 family of nano positioning linear stages is specifically designed for applications requiring extreme accuracy and geometric performance. This nano positioning stage excels with 0.5µm straightness and flatness per 50mm travel, along with pitch and yaw of 50µrad and 25µrad, respectively. When calibrated with an A-81x motion controller, the V-571 linear stages achieve guaranteed positioning accuracy of 100nm and bidirectional repeatability of +/-60nm. Applications include sample inspection, precision micro- assembly, semiconductor inspection and metrology, photonics alignment, as well as mass-production of ultra-high precision components.

The V-571 family of nano positioning linear stages is specifically designed for applications requiring extreme accuracy and geometric performance. This nano positioning stage excels with 0.5µm straightness and flatness per 50mm travel, along with pitch and yaw of 50µrad and 25µrad, respectively. When calibrated with an A-81x motion controller, the V-571 linear stages achieve guaranteed positioning accuracy of 100nm and bidirectional repeatability of +/-60nm. Applications include sample inspection, precision micro- assembly, semiconductor inspection and metrology, photonics alignment, as well as mass-production of ultra-high precision components.

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Technical Specifications

  PI (Physik Instrumente) L.P.
Product Category Linear Slides and Linear Stages
Product Number V-571
Product Name Nanopositioning Linear Stages
Axis Configuration X-Y Axes; X-Y-Z Axes
Stroke or X-Axis Travel 0.9843 to 3.94 inch (25 to 100 mm)
Rated Speed 19.69 in/sec (30 m/min)
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