The XYZ stage is based on the A-311 series planar XY air bearing stage and the L-310 series precision lift Z-stage. The air bearing stage is available in different travel ranges from 100x100mm to 300x400mm to match your application. Encoder options include incremental and BiSS type absolute encoders. The Z-stage provides 25mm high resolution vertical travel with 360° access. The individual stages are assembled and aligned, equipped with a custom cable management solution and delivered as an integrated XYZ motion system at our Hopkinton, MA facility. Factory optimized system configuration will be performed for each axis post-assembly with servo tuning optimization under application specific applied dummy load. Interferometer measurements will be performed to measure repeatability and accuracy with error mapping. Performances will be measured post-assembly on per-axis basis and documented in system metrology report. System Parameter Information including safety parameters will be saved to a high-performance, ACS-module based A-81x series motion controller ready for factory optimized operation on startup.
| PI (Physik Instrumente) L.P. | |
|---|---|
| Product Category | Linear Slides and Linear Stages |
| Product Name | XYZ Stage for Ultrafast Laser Material Processing |
| Axis Configuration | X-Y-Z Axes |
| Stroke or X-Axis Travel | 3.94 inch (100 mm) |
| Y-Axis Travel | 11.81 to 15.75 inch (300 to 400 mm) |
| Z-Axis Travel | 0.9843 inch (25 mm) |
