PI (Physik Instrumente) L.P. PIMars™ XYZ Piezo System P-561 · P-562 · P-563

Description
Parallel-Kinematics / Metrology for Enhanced Responsiveness / Multi-Axis Precision Travel Ranges to 340 x 340 x 340 µm Capacitive Sensors for Highest Linearity Frictionless, High-Precision Flexure Guiding System Excellent Scanning Flatness High-Dynamics XYZ Version Available; Custom Versions to 6-DOF Clear Aperture 66 x 66 mm Outstanding Lifetime Due to PICMA® Piezo Actuators UHV Versions to 10-9 hPa
  • PIMars™ XYZ Piezo System - P-561 · P-562 · P-563 - PI (Physik Instrumente) L.P.
    PI (Physik Instrumente) L.P.
Request a Quote Datasheet
Description
Parallel-Kinematics / Metrology for Enhanced Responsiveness / Multi-Axis Precision Travel Ranges to 340 x 340 x 340 µm Capacitive Sensors for Highest Linearity Frictionless, High-Precision Flexure Guiding System Excellent Scanning Flatness High-Dynamics XYZ Version Available; Custom Versions to 6-DOF Clear Aperture 66 x 66 mm Outstanding Lifetime Due to PICMA® Piezo Actuators UHV Versions to 10-9 hPa
Request a Quote Datasheet

Suppliers

Company
Product
Description
Supplier Links
PIMars™ XYZ Piezo System - P-561 · P-562 · P-563 - PI (Physik Instrumente) L.P.
PI (Physik Instrumente) L.P.
Shrewsbury, MA, United States
PIMars™ XYZ Piezo System
P-561 · P-562 · P-563
PIMars™ XYZ Piezo System P-561 · P-562 · P-563
Parallel-Kinematics / Metrology for Enhanced Responsiveness / Multi-Axis Precision Travel Ranges to 340 x 340 x 340 µm Capacitive Sensors for Highest Linearity Frictionless, High-Precision Flexure Guiding System Excellent Scanning Flatness High-Dynamics XYZ Version Available; Custom Versions to 6-DOF Clear Aperture 66 x 66 mm Outstanding Lifetime Due to PICMA® Piezo Actuators UHV Versions to 10-9 hPa
  • Parallel-Kinematics / Metrology for Enhanced Responsiveness / Multi-Axis Precision
  • Travel Ranges to 340 x 340 x 340 µm
  • Capacitive Sensors for Highest Linearity
  • Frictionless, High-Precision Flexure Guiding System
  • Excellent Scanning Flatness
  • High-Dynamics XYZ Version Available; Custom Versions to 6-DOF
  • Clear Aperture 66 x 66 mm
  • Outstanding Lifetime Due to PICMA® Piezo Actuators
  • UHV Versions to 10-9 hPa
Supplier's Site Datasheet

Technical Specifications

  PI (Physik Instrumente) L.P.
Product Category Linear Slides and Linear Stages
Product Number P-561 · P-562 · P-563
Product Name PIMars™ XYZ Piezo System
Axis Configuration X-Y-Z Axes
Stroke or X-Axis Travel 0.0039 to 0.0134 inch (0.1000 to 0.3400 mm)
Y-Axis Travel 0.0039 to 0.0134 inch (0.1000 to 0.3400 mm)
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