Parallel-Kinematics / Metrology for Enhanced Responsiveness / Multi-Axis Precision
Travel Ranges to 340 x 340 x 340 µm
Capacitive Sensors for Highest Linearity
Frictionless, High-Precision Flexure Guiding System
Excellent Scanning Flatness
High-Dynamics XYZ Version Available; Custom Versions to 6-DOF
Clear Aperture 66 x 66 mm
Outstanding Lifetime Due to PICMA® Piezo Actuators
UHV Versions to 10-9 hPa
PI (Physik Instrumente) L.P.
Done
Request a Quote
Email Supplier
Datasheet
Description
Parallel-Kinematics / Metrology for Enhanced Responsiveness / Multi-Axis Precision
Travel Ranges to 340 x 340 x 340 µm
Capacitive Sensors for Highest Linearity
Frictionless, High-Precision Flexure Guiding System
Excellent Scanning Flatness
High-Dynamics XYZ Version Available; Custom Versions to 6-DOF
Clear Aperture 66 x 66 mm
Outstanding Lifetime Due to PICMA® Piezo Actuators
UHV Versions to 10-9 hPa
Parallel-Kinematics / Metrology for Enhanced Responsiveness / Multi-Axis Precision
Travel Ranges to 340 x 340 x 340 µm
Capacitive Sensors for Highest Linearity
Frictionless, High-Precision Flexure Guiding System
Excellent Scanning Flatness
High-Dynamics XYZ Version Available; Custom Versions to 6-DOF
Clear Aperture 66 x 66 mm
Outstanding Lifetime Due to PICMA® Piezo Actuators
UHV Versions to 10-9 hPa
Parallel-Kinematics / Metrology for Enhanced Responsiveness / Multi-Axis Precision
Travel Ranges to 340 x 340 x 340 µm
Capacitive Sensors for Highest Linearity
Frictionless, High-Precision Flexure Guiding System
Excellent Scanning Flatness
High-Dynamics XYZ Version Available; Custom Versions to 6-DOF
Clear Aperture 66 x 66 mm
Outstanding Lifetime Due to PICMA® Piezo Actuators
