PI (Physik Instrumente) L.P.Multi-Axis Piezo-Nanopositioning StageP-527
Description
XYθ, XYZ and XY Versions
Precision Trajectory Control
Parallel-Kinematics/
Metrology for Enhanced Responsiveness / Multi-Axis Precision
Travel Ranges to 200 Micron
Clear Aperture to 66 x 66 mm
PICMA® High-Performance Multilayer Piezo Drives
PI (Physik Instrumente) L.P.
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Datasheet
Description
XYθ, XYZ and XY Versions
Precision Trajectory Control
Parallel-Kinematics/
Metrology for Enhanced Responsiveness / Multi-Axis Precision
Travel Ranges to 200 Micron
Clear Aperture to 66 x 66 mm
PICMA® High-Performance Multilayer Piezo Drives
XYθ, XYZ and XY Versions
Precision Trajectory Control
Parallel-Kinematics/
Metrology for Enhanced Responsiveness / Multi-Axis Precision
Travel Ranges to 200 Micron
Clear Aperture to 66 x 66 mm
PICMA® High-Performance Multilayer Piezo Drives
XYΘ, XYZ and XY Versions
Precision Trajectory Control
Parallel-Kinematics/Metrology for Enhanced Responsiveness / Multi-Axis Precision