P-518 / P-528 / P-558 -- PIEZO Z / TIP / TILT STAGE
PI (Physik Instrumente) L.P.Piezo Z / Tip / Tilt StageP-518 / P-528 / P-558
Description
Precision Trajectory Control
Parallel-Kinematics/
Metrology for Enhanced Responsiveness / Multi-Axis Precision
Travel Ranges to 200 Micron / 4 milliradian
Clear Aperture 66 x 66 mm
Direct Metrology with Capacitive Sensors for Highest Precision
PICMA® High-Performance Multilayer Piezo Drives
PI (Physik Instrumente) L.P.
Done
Request a Quote
Email Supplier
Description
Precision Trajectory Control
Parallel-Kinematics/
Metrology for Enhanced Responsiveness / Multi-Axis Precision
Travel Ranges to 200 Micron / 4 milliradian
Clear Aperture 66 x 66 mm
Direct Metrology with Capacitive Sensors for Highest Precision
PICMA® High-Performance Multilayer Piezo Drives
Precision Trajectory Control
Parallel-Kinematics/
Metrology for Enhanced Responsiveness / Multi-Axis Precision
Travel Ranges to 200 Micron / 4 milliradian
Clear Aperture 66 x 66 mm
Direct Metrology with Capacitive Sensors for Highest Precision
PICMA® High-Performance Multilayer Piezo Drives
Precision Trajectory Control
Parallel-Kinematics/Metrology for Enhanced Responsiveness / Multi-Axis Precision
Travel Ranges to 200 Micron / 4 milliradian
Clear Aperture 66 x 66 mm
Direct Metrology with Capacitive Sensors for Highest Precision
