PI (Physik Instrumente) L.P.
PIMars 6-Axis Piezo Stage System
P-562.6CD
Description
6 motion axes: 3 × linear, 3 × rotational
Travel ranges to 200 µm linear and to 1 mrad tilt angle
Enhanced responsiveness & multi-axis precision: Parallel kinematics / metrology
Highest linearity and stability with capacitive sensors
Frictionless, high-precision flexure guiding system
Excellent Scan-Flatness
Clear aperture 66 mm × 66 mm
Outstanding lifetime due to PICMA® piezo actuators
UHV-compatible to 10-9 hPa
-
PI (Physik Instrumente) L.P.
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Datasheet
Description
6 motion axes: 3 × linear, 3 × rotational
Travel ranges to 200 µm linear and to 1 mrad tilt angle
Enhanced responsiveness & multi-axis precision: Parallel kinematics / metrology
Highest linearity and stability with capacitive sensors
Frictionless, high-precision flexure guiding system
Excellent Scan-Flatness
Clear aperture 66 mm × 66 mm
Outstanding lifetime due to PICMA® piezo actuators
UHV-compatible to 10-9 hPa
Request a Quote
Email Supplier
Datasheet
Suppliers
6 motion axes: 3 × linear, 3 × rotational
Travel ranges to 200 µm linear and to 1 mrad tilt angle
Enhanced responsiveness & multi-axis precision: Parallel kinematics / metrology
Highest linearity and stability with capacitive sensors
Frictionless, high-precision flexure guiding system
Excellent Scan-Flatness
Clear aperture 66 mm × 66 mm
Outstanding lifetime due to PICMA® piezo actuators
UHV-compatible to 10-9 hPa
- 6 motion axes: 3 × linear, 3 × rotational
- Travel ranges to 200 µm linear and to 1 mrad tilt angle
- Enhanced responsiveness & multi-axis precision: Parallel kinematics / metrology
- Highest linearity and stability with capacitive sensors
- Frictionless, high-precision flexure guiding system
- Excellent Scan-Flatness
- Clear aperture 66 mm × 66 mm
- Outstanding lifetime due to PICMA® piezo actuators
- UHV-compatible to 10-9 hPa
Supplier's Site
Datasheet
Technical Specifications
|
Product Category
|
Linear Slides and Linear Stages |
|
Product Number
|
P-562.6CD |
|
Product Name
|
PIMars 6-Axis Piezo Stage System |
|
Axis Configuration
|
X-Y-Z Axes
|
|
Stroke or X-Axis Travel
|
0.0079 inch (0.2000 mm)
|
|
Y-Axis Travel
|
0.0079 inch (0.2000 mm)
|
|
Z-Axis Travel
|
0.0079 inch (0.2000 mm)
|
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