PI (Physik Instrumente) L.P. PIMars 6-Axis Piezo Stage System P-562.6CD

Description
6 motion axes: 3 × linear, 3 × rotational Travel ranges to 200 µm linear and to 1 mrad tilt angle Enhanced responsiveness & multi-axis precision: Parallel kinematics / metrology Highest linearity and stability with capacitive sensors Frictionless, high-precision flexure guiding system Excellent Scan-Flatness Clear aperture 66 mm × 66 mm Outstanding lifetime due to PICMA® piezo actuators UHV-compatible to 10-9 hPa
  • PIMars 6-Axis Piezo Stage System - P-562.6CD - PI (Physik Instrumente) L.P.
    PI (Physik Instrumente) L.P.
Request a Quote Datasheet
Description
6 motion axes: 3 × linear, 3 × rotational Travel ranges to 200 µm linear and to 1 mrad tilt angle Enhanced responsiveness & multi-axis precision: Parallel kinematics / metrology Highest linearity and stability with capacitive sensors Frictionless, high-precision flexure guiding system Excellent Scan-Flatness Clear aperture 66 mm × 66 mm Outstanding lifetime due to PICMA® piezo actuators UHV-compatible to 10-9 hPa
Request a Quote Datasheet

Suppliers

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Product
Description
Supplier Links
PIMars 6-Axis Piezo Stage System - P-562.6CD - PI (Physik Instrumente) L.P.
PI (Physik Instrumente) L.P.
Shrewsbury, MA, United States
PIMars 6-Axis Piezo Stage System
P-562.6CD
PIMars 6-Axis Piezo Stage System P-562.6CD
6 motion axes: 3 × linear, 3 × rotational Travel ranges to 200 µm linear and to 1 mrad tilt angle Enhanced responsiveness & multi-axis precision: Parallel kinematics / metrology Highest linearity and stability with capacitive sensors Frictionless, high-precision flexure guiding system Excellent Scan-Flatness Clear aperture 66 mm × 66 mm Outstanding lifetime due to PICMA® piezo actuators UHV-compatible to 10-9 hPa
  • 6 motion axes: 3 × linear, 3 × rotational
  • Travel ranges to 200 µm linear and to 1 mrad tilt angle
  • Enhanced responsiveness & multi-axis precision: Parallel kinematics / metrology
  • Highest linearity and stability with capacitive sensors
  • Frictionless, high-precision flexure guiding system
  • Excellent Scan-Flatness
  • Clear aperture 66 mm × 66 mm
  • Outstanding lifetime due to PICMA® piezo actuators
  • UHV-compatible to 10-9 hPa
Supplier's Site Datasheet

Technical Specifications

  PI (Physik Instrumente) L.P.
Product Category Linear Slides and Linear Stages
Product Number P-562.6CD
Product Name PIMars 6-Axis Piezo Stage System
Axis Configuration X-Y-Z Axes
Stroke or X-Axis Travel 0.0079 inch (0.2000 mm)
Y-Axis Travel 0.0079 inch (0.2000 mm)
Z-Axis Travel 0.0079 inch (0.2000 mm)
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