The IMP-NIR-TH3/90/IP68 is a compact right-angle wafer thickness sensor with a 3 mm working distance, a 1 to 6 mm operating range and IP68 protection. The sensor integrates a 4 m optical fiber and an air purge system for stable inline wafer measurements.
| Micro-Epsilon Group | |
|---|---|
| Product Category | Interferometers |
| Product Number | interferoMETER IMP-NIR-TH3/90/IP68 |
| Product Name | Sensors for wafer thickness measurements |
| Measurement Capability | Thickness; Specialty / Other; Wafer thickness |
