The IMS5400MP-DS absolute interferometer enables absolute distance measurements with nanometer resolution at a relatively large offset distance. With multi-peak distance measurement, up to 14 distance values can be evaluated, allowing the distance between glass and mask to be determined.
| Micro-Epsilon Group | |
|---|---|
| Product Category | Interferometers |
| Product Number | interferoMETER IMS5400MP-DS |
| Product Name | Absolute distance measurements with nanometer resolution |
| Measurement Capability | Displacement / Position; Specialty / Other; Distance |
| Optical Configuration | NIR-SLED interferometer |
| User Interface | Analog Control; Digital |
