The IMS5420-TH absolute interferometer opens up new perspectives in the industrial thickness measurement of monocrystalline silicon wafers and silicon carbide wafers and comparable materials that are transparent for a wavelength range of 1,100 nm. Due to its broadband superluminescent diode, the IMS5420-TH can be used for undoped, doped and highly doped silicon wafers.
| Micro-Epsilon Group | |
|---|---|
| Product Category | Interferometers |
| Product Number | interferoMETER IMS5420-TH |
| Product Name | High precision inline wafer thickness measurement |
| Measurement Capability | Thickness; Specialty / Other; Wafer thickness |
| Optical Configuration | NIR-SLED interferometer |
| User Interface | Analog Control; Digital |
