VAT, Inc. Transfer Insert MONOVAT Direct Series 032

Description
Transfer insert-valves for load lock / process module isolation. The inserts work virtually particle and vibration-free. Outstanding up-time: more than 5 million cycles between maintenance. Valve installation from the top. Gate service through chamber.
Description
Transfer insert-valves for load lock / process module isolation. The inserts work virtually particle and vibration-free. Outstanding up-time: more than 5 million cycles between maintenance. Valve installation from the top. Gate service through chamber.

Suppliers

Company
Product
Description
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Transfer Insert MONOVAT Direct - Series 032 - VAT, Inc.
San Jose, CA, USA
Transfer Insert MONOVAT Direct
Series 032
Transfer Insert MONOVAT Direct Series 032
Transfer insert-valves for load lock / process module isolation. The inserts work virtually particle and vibration-free. Outstanding up-time: more than 5 million cycles between maintenance. Valve installation from the top. Gate service through chamber.

Transfer insert-valves for load lock / process module isolation. The inserts work virtually particle and vibration-free. Outstanding up-time: more than 5 million cycles between maintenance. Valve installation from the top. Gate service through chamber.

Supplier's Site

Technical Specifications

  VAT, Inc.
Product Category Industrial Valves
Product Number Series 032
Product Name Transfer Insert MONOVAT Direct
Valve Type Transfer Valve
Primary Material Aluminum; Stainless Steel
Maximum Pressure 17.40 psi (12.25 m H2O)
Number of Ports 2
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