Transfer insert-valves for load lock / process module isolation. The inserts work virtually particle and vibration-free. Outstanding up-time: more than 5 million cycles between maintenance. Valve installation from the top. Gate service through chamber.
| VAT, Inc. | |
|---|---|
| Product Category | Industrial Valves |
| Product Number | Series 032 |
| Product Name | Transfer Insert MONOVAT Direct |
| Valve Type | Transfer Valve |
| Primary Material | Aluminum; Stainless Steel |
| Maximum Pressure | 17.40 psi (12.25 m H2O) |
| Number of Ports | 2 |
