Precise, High-Speed Measurements
High Resolution
0.004% @ 15 kHz typical (as low as 0.70 nanometers)
0.0007% @ 100 Hz typical (as low as 0.08 nanometers) Resolution is Probe/Range dependent, see Probes and Ranges below for specifics
User selectable bandwidth (100 Hz, 1 kHz, 10 kHz, 15 kHz)
Linearity: 0.5%, Typical
Small phase shift - excellent for servo applications
Convenient Output Interface and Range Selections
Measurement Ranges Available: 10 µm to 12.5 mm
±10 V Differential Output for highest precision and noise immunity
±10 V Single-Ended BNC output for quick, easy connection
Power connects through separate power connector or with differential analog output connections
Versatile, Useful Features
Single Channel
Compact for small space
Earth ground connection point
Standard Probes can be ordered as vacuum compatible.
Life-Cycle Status: Active
Precise, High-Speed Measurements
- High Resolution
- 0.004% @ 15 kHz typical (as low as 0.70 nanometers)
- 0.0007% @ 100 Hz typical (as low as 0.08 nanometers)
Resolution is Probe/Range dependent, see Probes and Ranges below for specifics
- User selectable bandwidth (100 Hz, 1 kHz, 10 kHz, 15 kHz)
- Linearity: 0.5%, Typical
- Small phase shift - excellent for servo applications
Convenient Output Interface and Range Selections
- Measurement Ranges Available: 10 µm to 12.5 mm
- ±10 V Differential Output for highest precision and noise immunity
- ±10 V Single-Ended BNC output for quick, easy connection
- Power connects through separate power connector or with differential analog output connections
Versatile, Useful Features
- Single Channel
- Compact for small space
- Earth ground connection point
- Standard Probes can be ordered as vacuum compatible.
Life-Cycle Status: Active
