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KEYENCE Spectral Interference Laser Displacement Meter SI-F01

Description
SI-F Series Spectral Interference Displacement MeterThe SI-F Series Spectral Interference Displacement Meter specializes in super-high accuracy displacement measurement for thickness or position measurement or surface mapping. With resolution down to 1nm, the SI Series is able to see even the smallest defects or changes in position. The fiber type sensor heads are as small as 2mm in diameter and generate no heat and are not influenced by electromagnetic noise for maximum flexibility. Common Applications:• Wafer Thickness• Glass Thickness• Surface Mapping• Stage Positioning• Precision Roller Runout• Warpage/Flatness

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Spectral Interference Laser Displacement Meter - SI-F01 - KEYENCE
Elmwood Park, NJ, USA
Spectral Interference Laser Displacement Meter
SI-F01
Spectral Interference Laser Displacement Meter SI-F01
SI-F Series Spectral Interference Displacement MeterThe SI-F Series Spectral Interference Displacement Meter specializes in super-high accuracy displacement measurement for thickness or position measurement or surface mapping. With resolution down to 1nm, the SI Series is able to see even the smallest defects or changes in position. The fiber type sensor heads are as small as 2mm in diameter and generate no heat and are not influenced by electromagnetic noise for maximum flexibility. Common Applications:• Wafer Thickness• Glass Thickness• Surface Mapping• Stage Positioning• Precision Roller Runout• Warpage/Flatness

SI-F Series Spectral Interference Displacement MeterThe SI-F Series Spectral Interference Displacement Meter specializes in super-high accuracy displacement measurement for thickness or position measurement or surface mapping. With resolution down to 1nm, the SI Series is able to see even the smallest defects or changes in position. The fiber type sensor heads are as small as 2mm in diameter and generate no heat and are not influenced by electromagnetic noise for maximum flexibility. Common Applications:• Wafer Thickness• Glass Thickness• Surface Mapping• Stage Positioning• Precision Roller Runout• Warpage/Flatness

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Technical Specifications

  KEYENCE
Product Category Linear Position Sensors
Product Number SI-F01
Product Name Spectral Interference Laser Displacement Meter
Sensor Technology Optical Triangulation Position Sensor
Measurement Range 0.0020 to 0.0400 inch (0.0508 to 1.02 mm)
Sampling Frequency 5 kHz
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