PI (Physik Instrumente) L.P.Capacitive SensorD-015 / D-050 / D-100
Description
For applications requiring highest precision
Measurement range to 1000 µm
Resolution to 0.01 nm
Linearity error to 0.01 % with digital controller
Bandwidth to 10 kHz
Servo controller E-509.CxA, compatible with E-500 piezo controller system
Custom designs
PI (Physik Instrumente) L.P.
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Datasheet
Description
For applications requiring highest precision
Measurement range to 1000 µm
Resolution to 0.01 nm
Linearity error to 0.01 % with digital controller
Bandwidth to 10 kHz
Servo controller E-509.CxA, compatible with E-500 piezo controller system
Custom designs
For applications requiring highest precision
Measurement range to 1000 µm
Resolution to 0.01 nm
Linearity error to 0.01 % with digital controller
Bandwidth to 10 kHz
Servo controller E-509.CxA, compatible with E-500 piezo controller system
Custom designs
For applications requiring highest precision
Measurement range to 1000 µm
Resolution to 0.01 nm
Linearity error to 0.01 % with digital controller
Bandwidth to 10 kHz
Servo controller E-509.CxA, compatible with E-500 piezo controller system
