5-10 kV Models Available
Performance:
Comdel's ESC-HV, Comdel's latest electrostatic chuck power supply, can be configured to deliver from 5 to 10KV of power for reliable handling in large surface processes. Equipped with low stored energy and built-in current limiting, the ESC-HV will safeguard your process from surges and arcs. This user-friendly design contains parameter adjustments through variable controls, and is fully programmable to give the user maximum flexibility. Contained in a compact chassis weighing 2.5 lbs, the ESC-HV can be located in any convenient location and in any orientation.
Applications:
The ESC-HV power supply provides reliable handling in large surface processes.
Features:
| Comdel, Inc. | |
|---|---|
| Product Category | Power Supplies |
| Product Number | ESC HV |
| Product Name | ESC Series - Electrostatic Chuck DC High Power |
| Type | DC Power Supply; High Voltage |
| Form Factor | Desktop / Free Standing; Rack Mount |
| Applications | Magnetic, Semiconductor/Thin Film, Electrostatic Chuck |
| Operating Temperature | 0 to 40 C (32 to 104 F) |
| Regulatory Compliance | RoHS |