Transfer valves for load lock / process module isolation. The valves work virtually particle and vibration-free. Outstanding up-time: more than 5 million cycles between maintenance.
| VAT, Inc. | |
|---|---|
| Product Category | Vacuum Valves |
| Product Number | Series 022 |
| Product Name | Transfer Valve MONOVAT Direct |
| Type | Transfer Valve |
| Vacuum / Pressure Range | (UHV, < 10-8 torr); Elevated or positive pressures (>> 760 torr) |
| Temperature Range | 392 F (200 C) |
| Port Flange & Seal Type | Elastomeric / O-ring |
