PI (Physik Instrumente) L.P. Ultra Precision Rotation Stage UPR-120

The UPR-120 is an ultraprecision rotation stage designed for high-accuracy angular positioning in applications such as metrology, semiconductor technology, and medical industry. It features a 35 mm clear aperture, unlimited angular travel, and a maximum velocity of 360 °/s. The stage uses a 2-phase iron-core torque motor with a 48 V DC intermediate circuit and a sin/cos incremental encoder offering 0.017 µrad resolution. Motion performance includes unidirectional repeatability of 1.4 µrad typ., flatness of ±1 µm typ., eccentricity of ±3 µm typ., and wobble of ±25 µrad typ. It is mounted on crossed roller bearings, has a load capacity of 200 N, and is constructed from aluminum with a black anodized finish. The operating temperature range is 5 to 40 °C, and the mass is 6 kg ±5%. Connection is via Sub-D 9W4 (motor) and Sub-D 15 (sensor). A recommended controller is the C-885 with C-891.10C885.