PI (Physik Instrumente) L.P. Miniature Stage, XY Combination, Ultrasonic Piezo Motor U-521 / M-663

Description
The U-751/M-686 Low-Profile XY Stage with Ultrasonic Linear MotorsM-663 miniature positioning stage provides high acceleration and speed to 250mm/sec. It is based on a compact ultrasonic ceramic linear motor and provides 18mm travel. Two linear encoder versions are offered, featuring 0.6 and 0.1 microns resolution, respectively. The M-663's square footprint makes it suitable for use in compact XY configurations. Fast and Compact Positioning Stage with Closed-Loop Linear Motor and Encoder 18mm Positioning Range Velocity to 250mm/sec Fast Step & Settle Self-Clamping Design for Long Term Stability, no Servo Dither Choice of Encoders: Economical / Precision /li> Vacuum Option
  • Miniature Stage, XY Combination, Ultrasonic Piezo Motor - U-521 / M-663 - PI (Physik Instrumente) L.P.
    PI (Physik Instrumente) L.P.
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Description
The U-751/M-686 Low-Profile XY Stage with Ultrasonic Linear MotorsM-663 miniature positioning stage provides high acceleration and speed to 250mm/sec. It is based on a compact ultrasonic ceramic linear motor and provides 18mm travel. Two linear encoder versions are offered, featuring 0.6 and 0.1 microns resolution, respectively. The M-663's square footprint makes it suitable for use in compact XY configurations. Fast and Compact Positioning Stage with Closed-Loop Linear Motor and Encoder 18mm Positioning Range Velocity to 250mm/sec Fast Step & Settle Self-Clamping Design for Long Term Stability, no Servo Dither Choice of Encoders: Economical / Precision /li> Vacuum Option
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Suppliers

Company
Product
Description
Supplier Links
Miniature Stage, XY Combination, Ultrasonic Piezo Motor - U-521 / M-663 - PI (Physik Instrumente) L.P.
PI (Physik Instrumente) L.P.
Shrewsbury, MA, United States
Miniature Stage, XY Combination, Ultrasonic Piezo Motor
U-521 / M-663
Miniature Stage, XY Combination, Ultrasonic Piezo Motor U-521 / M-663
The U-751/M-686 Low-Profile XY Stage with Ultrasonic Linear MotorsM-663 miniature positioning stage provides high acceleration and speed to 250mm/sec. It is based on a compact ultrasonic ceramic linear motor and provides 18mm travel. Two linear encoder versions are offered, featuring 0.6 and 0.1 microns resolution, respectively. The M-663's square footprint makes it suitable for use in compact XY configurations. Fast and Compact Positioning Stage with Closed-Loop Linear Motor and Encoder 18mm Positioning Range Velocity to 250mm/sec Fast Step & Settle Self-Clamping Design for Long Term Stability, no Servo Dither Choice of Encoders: Economical / Precision /li> Vacuum Option

The U-751/M-686 Low-Profile XY Stage with Ultrasonic Linear MotorsM-663 miniature positioning stage provides high acceleration and speed to 250mm/sec. It is based on a compact ultrasonic ceramic linear motor and provides 18mm travel. Two linear encoder versions are offered, featuring 0.6 and 0.1 microns resolution, respectively. The M-663's square footprint makes it suitable for use in compact XY configurations.


  • Fast and Compact Positioning Stage with Closed-Loop Linear Motor and Encoder
  • 18mm Positioning Range
  • Velocity to 250mm/sec
  • Fast Step & Settle
  • Self-Clamping Design for Long Term Stability, no Servo Dither
  • Choice of Encoders: Economical / Precision /li>
  • Vacuum Option
Supplier's Site Datasheet

Technical Specifications

  PI (Physik Instrumente) L.P.
Product Category Linear Slides and Linear Stages
Product Number U-521 / M-663
Product Name Miniature Stage, XY Combination, Ultrasonic Piezo Motor
Axis Configuration X-Y Axes
Stroke or X-Axis Travel 0.7480 inch (19 mm)
Rated Speed 15.75 in/sec (24 m/min)
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