PI (Physik Instrumente) L.P. Miniature Stage, XY Combination, Ultrasonic Piezo Motor U-521 / M-663

The U-751/M-686 Low-Profile XY Stage with Ultrasonic Linear MotorsM-663 miniature positioning stage provides high acceleration and speed to 250mm/sec. It is based on a compact ultrasonic ceramic linear motor and provides 18mm travel. Two linear encoder versions are offered, featuring 0.6 and 0.1 microns resolution, respectively. The M-663's square footprint makes it suitable for use in compact XY configurations. Fast and Compact Positioning Stage with Closed-Loop Linear Motor and Encoder 18mm Positioning Range Velocity to 250mm/sec Fast Step & Settle Self-Clamping Design for Long Term Stability, no Servo Dither Choice of Encoders: Economical / Precision /li> Vacuum Option