Only 32 mm wide and 7 mm high
Direct position measurement with incremental encoder with 0.75 µrad resolution (optional)
Up to 3 µrad minimum incremental motion
Rotation range >360°
Velocity 45 °/s
Suitable for high vacuum to 10-6 hPa, ultrahigh vacuum variants for 10-9 hPa are also available
Precision-class micro positioning stage
Q-Motion stages have very small dimensions and a high position resolution in the nanometer range. The piezo motor drive principle and the electrical operation are cost-efficient and can be customized
PIShift piezo inertia drives
Self-locking at rest, thus no heat generation. Velocity to 45 °/s. 7 m Nm holding torque, 6 m Nm drive torque
Fields of application
Industry and research. For metrology, microscopy, micromanipulation, biotechnology and automation
- Only 32 mm wide and 7 mm high
- Direct position measurement with incremental encoder with 0.75 µrad resolution (optional)
- Up to 3 µrad minimum incremental motion
- Rotation range >360°
- Velocity 45 °/s
- Suitable for high vacuum to 10-6 hPa, ultrahigh vacuum variants for 10-9 hPa are also available
Precision-class micro positioning stage
Q-Motion stages have very small dimensions and a high position resolution in the nanometer range. The piezo motor drive principle and the electrical operation are cost-efficient and can be customized
PIShift piezo inertia drives
Self-locking at rest, thus no heat generation. Velocity to 45 °/s. 7 m Nm holding torque, 6 m Nm drive torque
Fields of application
Industry and research. For metrology, microscopy, micromanipulation, biotechnology and automation
