Ultra-Precision Trajectory Control, Ideal for Surface Analysis and Scanning Microscopy
Low Bow: Flatness in the Low Nanometer Range
Parallel-Kinematics/
Metrology for Enhanced Responsiveness, Decoupling of X-Y-Z Motion
100 x 100 Micron Travel Range
Direct-Metrology Capacitive Sensors for Higher Precision
56 x 56 mm Clear Aperture
PICMA®High-Performance Multilayer Piezo Drives
PI (Physik Instrumente) L.P.
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Description
Ultra-Precision Trajectory Control, Ideal for Surface Analysis and Scanning Microscopy
Low Bow: Flatness in the Low Nanometer Range
Parallel-Kinematics/
Metrology for Enhanced Responsiveness, Decoupling of X-Y-Z Motion
100 x 100 Micron Travel Range
Direct-Metrology Capacitive Sensors for Higher Precision
56 x 56 mm Clear Aperture
PICMA®High-Performance Multilayer Piezo Drives
Ultra-Precision Trajectory Control, Ideal for Surface Analysis and Scanning Microscopy
Low Bow: Flatness in the Low Nanometer Range
Parallel-Kinematics/
Metrology for Enhanced Responsiveness, Decoupling of X-Y-Z Motion
100 x 100 Micron Travel Range
Direct-Metrology Capacitive Sensors for Higher Precision
56 x 56 mm Clear Aperture
PICMA®High-Performance Multilayer Piezo Drives
Ultra-Precision Trajectory Control, Ideal for Surface Analysis and Scanning Microscopy
Low Bow: Flatness in the Low Nanometer Range
Parallel-Kinematics/Metrology for Enhanced Responsiveness, Decoupling of X-Y-Z Motion
100 x 100 Micron Travel Range
Direct-Metrology Capacitive Sensors for Higher Precision
