PI (Physik Instrumente) L.P. PIHera XY Piezo Stage P-620.2 – P-629.2

The PIHera XY piezo stage is a high-precision nanopositioning device with travel ranges from 50 µm to 1800 µm, using PICMA® piezo actuators and capacitive sensors for subnanometer resolution and 0.02% positioning accuracy. It employs frictionless flexure guides, enabling high stiffness and load capacity up to 10 N push and 8 N pull. Bidirectional repeatability is 2 nm for smaller travel models, rising to 14 nm for the 1500 µm variant. Stiffness ranges from 0.2 to 0.25 N/µm, with unloaded resonant frequencies up to 800 Hz. The stage operates from -20 °C to 80 °C or 150 °C, uses aluminum construction, and has 1.5 m cables with D-sub or LEMO connectors. Power consumption ranges from 2 W to 38 W depending on travel range and sensor configuration.