PI (Physik Instrumente) L.P. PIHera XY Piezo Stage P-620.2 – P-629.2

Description
XY-Travel to 1800 µm Compact Design Resolution <1 Nanometer Frictionless Precision Flexure Guiding System PICMA® High-Performance Multilayer Piezo Drives Direct Metrology with Capacitive Sensors for Highest Precision Up to 0.02% Position Accuracy X, XY, Z, XYZ Versions Vacuum-Compatible Versions
  • PIHera XY Piezo Stage - P-620.2 – P-629.2 - PI (Physik Instrumente) L.P.
    PI (Physik Instrumente) L.P.
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Description
XY-Travel to 1800 µm Compact Design Resolution <1 Nanometer Frictionless Precision Flexure Guiding System PICMA® High-Performance Multilayer Piezo Drives Direct Metrology with Capacitive Sensors for Highest Precision Up to 0.02% Position Accuracy X, XY, Z, XYZ Versions Vacuum-Compatible Versions
Request a Quote Datasheet

Suppliers

Company
Product
Description
Supplier Links
PIHera XY Piezo Stage - P-620.2 – P-629.2 - PI (Physik Instrumente) L.P.
PI (Physik Instrumente) L.P.
Shrewsbury, MA, United States
PIHera XY Piezo Stage
P-620.2 – P-629.2
PIHera XY Piezo Stage P-620.2 – P-629.2
XY-Travel to 1800 µm Compact Design Resolution <1 Nanometer Frictionless Precision Flexure Guiding System PICMA® High-Performance Multilayer Piezo Drives Direct Metrology with Capacitive Sensors for Highest Precision Up to 0.02% Position Accuracy X, XY, Z, XYZ Versions Vacuum-Compatible Versions
  • XY-Travel to 1800 µm
  • Compact Design
  • Resolution <1 Nanometer
  • Frictionless Precision Flexure Guiding System
  • PICMA® High-Performance Multilayer Piezo Drives
  • Direct Metrology with Capacitive Sensors for Highest Precision
  • Up to 0.02% Position Accuracy
  • X, XY, Z, XYZ Versions
  • Vacuum-Compatible Versions
Supplier's Site Datasheet

Technical Specifications

  PI (Physik Instrumente) L.P.
Product Category Microscope Stages
Product Number P-620.2 – P-629.2
Product Name PIHera XY Piezo Stage
Stage Type Motorized Stage
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