PI (Physik Instrumente) L.P. PIglide AT1 Compact Linear Air Bearing Stage A-121

The PIglide AT1 series of compact stages are linear servo motor driven with fully preloaded air bearings and an integral optical linear encoder. The combination of these non-contact components results in a frictionless motion platform that offers the highest performance, quality and life. These stages are ideally suited for many high precision applications, such as metrology, photonics alignment, semiconductor inspection, flat panel display, laser machining, and precision scanning applications. The non-contact design also makes these stages ideal for cleanroom applications. A high-force linear motor can drive the stage to top speed within a few milliseconds. The dovetail preloaded air bearing design in this model will support normal, vertical, and side-mounted orientation. Travel to 350mm Table Size 115mm x 115mm Low Profile 60 mm Height Load to 10kg Resolution to 1nm Velocity to 1m/s, Acceleration to 2g's Straightness/Flatnes s to 0.1µm / 25mm