Newport’s new ZVR-PP is an integrated Z-vertical and Theta-rotation positioning stage designed to precisely elevate and rotate 200 mm and/or 300 mm diameter wafer chucks. The ZVR-PP offers precise 10 mm vertical and continuous 360 degree angular travel in a very low profile design. The low mass and high natural frequency of the ZVR-PP, provides a platform for rapid step-and-settle applications. With integrated vacuum and electrical lines accessed at a single point, and a three point mounting interface, the ZVR-PP offers convenient, stable, and high performance capability for applications such as wafer positioning. Please refer to the datasheet for full specifications on the ZVR-PP.Please refer to the datasheet for the complete specifications on the rotational and vertical motion capabilities of the ZVR-PP.
| Newport MKS | |
|---|---|
| Product Category | Rotary Stages |
| Product Number | ZVR-PP |
| Product Name | Wafer Positioning Stage, Integrated Vertical and Stepper Rotation Stage |
| Stage Type | Rotary Positioning |
