The IMS5420IP67MP-TH absolute interferometer is designed for challenging environmental conditions and combines an IP67 stainless steel controller with multipeak thickness measurement of up to five layers. It is suitable for inline wafer thickness, air gap, film and coating measurements.
| Micro-Epsilon Group | |
|---|---|
| Product Category | Interferometers |
| Product Number | interferoMETER IMS5420IP67MP-TH |
| Product Name | High precision inline wafer thickness measurement |
| Measurement Capability | Thickness; Specialty / Other; Wafer thickness |
| Optical Configuration | NIR-SLED interferometer |
| User Interface | Digital |
