The PR-PD2 Particle Detection System enables fine particle detection down to 0.35μm and also boasts a multi-stage sorter plus has a full range of communication functions. High-throughput measurement is possible on all surfaces from basic reticle and mask to glass and pellicle.
| HORIBA Instruments, Inc. | |
|---|---|
| Product Category | Particle Analyzers |
| Product Number | PR-PD2 |
| Product Name | Reticle/Mask Particle Detection System |
| Measurement Type | Size |