HORIBA Instruments, Inc. Low-Cost Reticle/Mask Particle Detection System PR-PD5

Description
The PR-PD5 Particle Detection System has been designed to be integrated with any other system as a space-saving measure. Installing the PR-PD5 to the conveyor, or the reticle stocker, allows the performance of simultaneous inspection, while combining it with the cleaning device enables inspection during the cleaning process. Reticle inversion mechanism 0.5μm to 50μm selectability Single detection system Built-in and combination types
  • Low-Cost Reticle/Mask Particle Detection System - PR-PD5 - HORIBA Instruments, Inc.
    HORIBA Instruments, Inc.
Description
The PR-PD5 Particle Detection System has been designed to be integrated with any other system as a space-saving measure. Installing the PR-PD5 to the conveyor, or the reticle stocker, allows the performance of simultaneous inspection, while combining it with the cleaning device enables inspection during the cleaning process. Reticle inversion mechanism 0.5μm to 50μm selectability Single detection system Built-in and combination types

Suppliers

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Product
Description
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Low-Cost Reticle/Mask Particle Detection System - PR-PD5 - HORIBA Instruments, Inc.
HORIBA Instruments, Inc.
Irvine, CA, United States
Low-Cost Reticle/Mask Particle Detection System
PR-PD5
Low-Cost Reticle/Mask Particle Detection System PR-PD5
The PR-PD5 Particle Detection System has been designed to be integrated with any other system as a space-saving measure. Installing the PR-PD5 to the conveyor, or the reticle stocker, allows the performance of simultaneous inspection, while combining it with the cleaning device enables inspection during the cleaning process. Reticle inversion mechanism 0.5μm to 50μm selectability Single detection system Built-in and combination types

The PR-PD5 Particle Detection System has been designed to be integrated with any other system as a space-saving measure. Installing the PR-PD5 to the conveyor, or the reticle stocker, allows the performance of simultaneous inspection, while combining it with the cleaning device enables inspection during the cleaning process.

  • Reticle inversion mechanism
  • 0.5μm to 50μm selectability
  • Single detection system
  • Built-in and combination types
Supplier's Site

Technical Specifications

  HORIBA Instruments, Inc.
Product Category Particle Analyzers
Product Number PR-PD5
Product Name Low-Cost Reticle/Mask Particle Detection System
Measurement Type Size
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