TSI Incorporated Turbo-Vaporizer 2860PE 2860PE

Description
The 2860PE was designed as a drop-in replacement for poorly performing DLI valves. This model has the state-of-the art PE atomizer with on-board flow control, delivering superior vapor quality with significantly lower maintenance. Dimensions 236 mm  x 81 mm x 89 mm (9.3 in. x 3.2 in. x 3.5 in.) Fittings (on the unit) Carrier Gas Inlet 1/4 in. VCR female split nut Liquid Inlet 1/8 in. VCR female Vapor Outlet 1/4 in. VCR female Wetted Parts SS 316, PEEK, PCTFE, PTFE, Kalrez®, Elgiloy® Leak Integrity <1 x 10-9 scc/sec Helium Heater Power Requirements 220 VAC, 60 Hz, 300W Carrier Gas Inert gas recommended Gas Inlet Pressure Range 0–80 psig inlet pressure Max. Carrier Gas Flow Rate* N2 15 standard L/min Max. Liquid Flow* TEOS equivalent 300 g/hr Max. Liquid Flow* DI Water 30 g/hr System Pressure Limit 120 psig Temperature Range 40°C to 200°C Vaporizer Body Vacuum tight chamber with multi-stage heat exchanger, SS 316 construction Temperature Sensor Type K thermocouple Specifications subject to change without notice * Liquid and gas flow ranges are affected by liquid and gas type
Datasheet
Description
The 2860PE was designed as a drop-in replacement for poorly performing DLI valves. This model has the state-of-the art PE atomizer with on-board flow control, delivering superior vapor quality with significantly lower maintenance. Dimensions 236 mm  x 81 mm x 89 mm (9.3 in. x 3.2 in. x 3.5 in.) Fittings (on the unit) Carrier Gas Inlet 1/4 in. VCR female split nut Liquid Inlet 1/8 in. VCR female Vapor Outlet 1/4 in. VCR female Wetted Parts SS 316, PEEK, PCTFE, PTFE, Kalrez®, Elgiloy® Leak Integrity <1 x 10-9 scc/sec Helium Heater Power Requirements 220 VAC, 60 Hz, 300W Carrier Gas Inert gas recommended Gas Inlet Pressure Range 0–80 psig inlet pressure Max. Carrier Gas Flow Rate* N2 15 standard L/min Max. Liquid Flow* TEOS equivalent 300 g/hr Max. Liquid Flow* DI Water 30 g/hr System Pressure Limit 120 psig Temperature Range 40°C to 200°C Vaporizer Body Vacuum tight chamber with multi-stage heat exchanger, SS 316 construction Temperature Sensor Type K thermocouple Specifications subject to change without notice * Liquid and gas flow ranges are affected by liquid and gas type
Datasheet

Suppliers

Company
Product
Description
Supplier Links
Turbo-Vaporizer 2860PE - 2860PE - TSI Incorporated
Shoreview, MN, United States
Turbo-Vaporizer 2860PE
2860PE
Turbo-Vaporizer 2860PE 2860PE
The 2860PE was designed as a drop-in replacement for poorly performing DLI valves. This model has the state-of-the art PE atomizer with on-board flow control, delivering superior vapor quality with significantly lower maintenance. Dimensions 236 mm  x 81 mm x 89 mm (9.3 in. x 3.2 in. x 3.5 in.) Fittings (on the unit) Carrier Gas Inlet 1/4 in. VCR female split nut Liquid Inlet 1/8 in. VCR female Vapor Outlet 1/4 in. VCR female Wetted Parts SS 316, PEEK, PCTFE, PTFE, Kalrez®, Elgiloy® Leak Integrity <1 x 10-9 scc/sec Helium Heater Power Requirements 220 VAC, 60 Hz, 300W Carrier Gas Inert gas recommended Gas Inlet Pressure Range 0–80 psig inlet pressure Max. Carrier Gas Flow Rate* N2 15 standard L/min Max. Liquid Flow* TEOS equivalent 300 g/hr Max. Liquid Flow* DI Water 30 g/hr System Pressure Limit 120 psig Temperature Range 40°C to 200°C Vaporizer Body Vacuum tight chamber with multi-stage heat exchanger, SS 316 construction Temperature Sensor Type K thermocouple Specifications subject to change without notice * Liquid and gas flow ranges are affected by liquid and gas type

The 2860PE was designed as a drop-in replacement for poorly performing DLI valves. This model has the state-of-the art PE atomizer with on-board flow control, delivering superior vapor quality with significantly lower maintenance.

Dimensions

236 mm  x 81 mm x 89 mm (9.3 in. x 3.2 in. x 3.5 in.)


Fittings (on the unit) Carrier Gas Inlet 1/4 in. VCR female split nut
Liquid Inlet 1/8 in. VCR female
Vapor Outlet 1/4 in. VCR female
Wetted Parts SS 316, PEEK, PCTFE, PTFE, Kalrez®, Elgiloy®
Leak Integrity <1 x 10-9 scc/sec Helium
Heater Power Requirements 220 VAC, 60 Hz, 300W
Carrier Gas Inert gas recommended
Gas Inlet Pressure Range 0–80 psig inlet pressure
Max. Carrier Gas Flow Rate* N2 15 standard L/min
Max. Liquid Flow* TEOS equivalent 300 g/hr
Max. Liquid Flow* DI Water 30 g/hr
System Pressure Limit 120 psig
Temperature Range 40°C to 200°C
Vaporizer Body Vacuum tight chamber with multi-stage heat exchanger, SS 316 construction
Temperature Sensor Type K thermocouple

Specifications subject to change without notice
* Liquid and gas flow ranges are affected by liquid and gas type

Supplier's Site Datasheet

Technical Specifications

  TSI Incorporated
Product Category MEMS Processing Equipment
Product Number 2860PE
Product Name Turbo-Vaporizer 2860PE
Process Chemical Vapor Deposition; Physical Vapor Deposition
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