The 2860PE was designed as a drop-in replacement for poorly performing DLI valves. This model has the state-of-the art PE atomizer with on-board flow control, delivering superior vapor quality with significantly lower maintenance.
Dimensions
236 mm x 81 mm x 89 mm (9.3 in. x 3.2 in. x 3.5 in.)
Fittings (on the unit) Carrier Gas Inlet 1/4 in. VCR female split nut
Liquid Inlet 1/8 in. VCR female
Vapor Outlet 1/4 in. VCR female
Wetted Parts SS 316, PEEK, PCTFE, PTFE, Kalrez®, Elgiloy®
Leak Integrity <1 x 10-9 scc/sec Helium
Heater Power Requirements 220 VAC, 60 Hz, 300W
Carrier Gas Inert gas recommended
Gas Inlet Pressure Range 0–80 psig inlet pressure
Max. Carrier Gas Flow Rate* N2 15 standard L/min
Max. Liquid Flow* TEOS equivalent 300 g/hr
Max. Liquid Flow* DI Water 30 g/hr
System Pressure Limit 120 psig
Temperature Range 40°C to 200°C
Vaporizer Body Vacuum tight chamber with multi-stage heat exchanger, SS 316 construction
Temperature Sensor Type K thermocouple
Specifications subject to change without notice
* Liquid and gas flow ranges are affected by liquid and gas type
| TSI Incorporated | |
|---|---|
| Product Category | MEMS Processing Equipment |
| Product Number | 2860PE |
| Product Name | Turbo-Vaporizer 2860PE |
| Process | Chemical Vapor Deposition; Physical Vapor Deposition |